Patents by Inventor Norris E. Tidwell

Norris E. Tidwell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for minimizing particle generation on a wafer surface during high pressure oxidation of silicon
    Patent number: 5401692
    Abstract: A wafer 2 is supported polished (active) face down in a recess formed in the upper surface of a second wafer 4 which serves as a wafer support. The two wafers 2, 4 are disposed in an atmosphere of steam at 900.degree. C. at a pressure of 500 psi which results in forming an oxide on the polished face of the wafer 2.
    Type: Grant
    Filed: June 15, 1993
    Date of Patent: March 28, 1995
    Assignee: Texas Instruments Incorporated
    Inventors: Andrew P. Lane, Norris E. Tidwell