Patents by Inventor Norton Adam

Norton Adam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Auto focus of a workpiece using two or more focus parameters
    Patent number: 7948630
    Abstract: Provided is a method for focusing a workpiece in the Z-axis for optical metrology. The auto focusing subsystem includes a focus detector having a tilt angle, a capture range, and a plurality of sensors. A processor coupled to the focus detector is configured to utilize the plurality of focus signals measured using the focus detector to determine two or more focus parameters. The two or more focus parameters and calibration data are used to determine an initial position of the workpiece and to generate instructions to move the workpiece to a best focus position.
    Type: Grant
    Filed: October 8, 2008
    Date of Patent: May 24, 2011
    Assignee: Tokyo Electron Limited
    Inventors: Norton Adam, Xinkang Tian