Patents by Inventor Noud J. Gilissen

Noud J. Gilissen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cooling of voice coil motors
    Patent number: 7057313
    Abstract: A voice coil motor used, for example, in a positioning device associated with either a first object table or a second object table in which the coil is cooled with a cooling jacket in thermal contact with the coil, the cooling jacket comprising at least one channel for circulation of a cooling fluid, the or each channel being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil, for use, for example, in a lithographic projection apparatus including a radiation system for supplying a projection beam of radiation, a first object table for holding a mask, a second object table for holding a substrate, a projection system for imaging irradiated portions of the mask onto target portions of the substrate. The cooling jacket may be formed of a ceramic material and may be of a monolithic construction.
    Type: Grant
    Filed: October 6, 2004
    Date of Patent: June 6, 2006
    Assignee: ASML Netherlands B.V.
    Inventors: Edwin J. Buis, Noud J. Gilissen, Yim Bun P. Kwan, Paulus H. C. M. Schapendonk
  • Cooling of voice coil motors in lithographic projection apparatus
    Publication number: 20040079898
    Abstract: A voice coil motor used in a positioning means associated with either a first object table or a second object table in which the coil is cooled with a cooling jacket in thermal contact with the coil, the cooling jacket comprising at least one channel for circulation of a cooling fluid, the or each channel being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil, for use in a lithographic projection apparatus comprising:
    Type: Application
    Filed: October 15, 2003
    Publication date: April 29, 2004
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Edwin J. Buis, Noud J. Gilissen, Yim Bun P. Kwan, Paulus H.C.M. Schapendonk
  • Cooling of voice coil motors in lithographic projection apparatus
    Patent number: 6657204
    Abstract: A voice coil motor used in a positioning means associated with either a first object table or a second object table in which the coil is cooled with a cooling jacket in thermal contact with the coil, the cooling jacket comprising at least one channel for circulation of a cooling fluid, the or each channel being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil, for use in a lithographic projection apparatus comprising: a radiation system for supplying a projection beam of radiation; a first object table for holding a mask; a second object table for holding a substrate; a projection system for imaging irradiated portions of the mask onto target portions of the substrate. The cooling jacket may be formed of a ceramic material and preferably is of a monolithic construction.
    Type: Grant
    Filed: February 7, 2001
    Date of Patent: December 2, 2003
    Assignee: ASML Netherlands B.V.
    Inventors: Edwin J. Buis, Noud J. Gilissen, Yim Bun P. Kwan, Paulus H.C.M. Schapendonk
  • Cooling of voice coil motors in lithographic projection apparatus
    Publication number: 20010013580
    Abstract: A voice coil motor used in a positioning means associated with either a first object table or a second object table in which the coil is cooled with a cooling jacket in thermal contact with the coil, the cooling jacket comprising at least one channel for circulation of a cooling fluid, the or each channel being arranged such as to be substantially located in a portion of the cooling jacket adjacent to the coil.
    Type: Application
    Filed: February 7, 2001
    Publication date: August 16, 2001
    Inventors: Edwin J. Buis, Noud J. Gilissen, Yim Bun P. Kwan, Paulus H.C.M. Schapendonk