Patents by Inventor Nozomu KANETAKE

Nozomu KANETAKE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE WARPAGE CORRECTION METHOD, COMPUTER STORAGE MEDIUM, AND SUBSTRATE WARPAGE CORRECTION APPARATUS
    Publication number: 20210039221
    Abstract: A substrate warpage correction method according to this disclosure corrects warpage of a substrate without performing a process on a front surface of the substrate. The substrate warpage correction method includes a surface roughening of performing a surface roughening process on a rear surface of the substrate using a surface roughening processing apparatus configured to be able to perform the surface roughening process on the rear surface of the substrate, to form grooves in the rear surface to thereby correct the warpage of the substrate.
    Type: Application
    Filed: February 26, 2019
    Publication date: February 11, 2021
    Inventors: Nozomu KANETAKE, Akihiro KUBO, Teruhiko KODAMA, Taro YAMAMOTO, Yasushi TAKIGUCHI, Yoshiki OKAMOTO, Hayato HOSAKA