Abstract: Magnetically Driven Simultaneous Assembly is a method for the integration of devices onto substrates. It is a non-statistical, fully controllable and deterministic, simultaneous method of assembly with error checking and handling that is capable of scalable, versatile, and high-yield integration. The method employs a combination of magnetic and gravitational forces (as well as a bonding agent) to assemble devices onto substrates. Devices, coated with a layer of a soft magnetic material, are moved from an initial to a final location by the action of an array of electromagnets above a template. Various devices of arbitrary geometries, with different physical properties and functionalities, are positioned simultaneously above specific desired locations and dropped onto a template under the action of gravity by locally weakening the applied magnetic field. Desired locations on the template correspond to sites on a substrate that contain recesses matching the specifics of the devices.

Abstract: This patent discloses an integrated electronic and optical MEMS (micro-electro-mechanical systems) based sensor wherein the same embossed diaphragm is used as the sensing element of both integrated parts. The optical part of the sensor is based on a Fabry-Perot cavity and the electronic part of the sensor is based on the piezoresistive effect. The signal output obtained from the electronic part of the sensor will be used to assist the fabrication of the Fabry-Perot cavities and as a reference to establish the quiescence point (Q-point) of the signal output from the optical part of the sensor. The invention includes sensors for detecting mechanical movements, such as those caused by pressure, sound, magnetic fields, temperature, chemical reaction or biological activities.