Publication number: 20120153287
Abstract: An etchant includes: 5 to 20 wt % of persulfate, 1 to 10 wt % of at least one compound of an inorganic acid, an inorganic acid salt, or a mixture thereof, 0.3 to 5 wt % of a cyclic amine compound, 1 to 10 wt % of at least one compound of an organic acid, an organic acid salt, or a mixture thereof, 0.1 to 5 wt % of p-toluenesulfonic acid, and water, based on the total weight of the etchant. A copper-titanium etchant further includes 0.01 to 2 wt % of a fluoride-containing compound. A method of forming a display device using the etchant, and a display device, are also disclosed.
Type:
Application
Filed:
June 24, 2011
Publication date:
June 21, 2012
Applicants:
DONGWOO FINE-CHEM CO., LTD., SAMSUNG ELECTRONICS CO., LTD.
Inventors:
Hong-Sick PARK, Wang-Woo LEE, Sang-Tae KIM, Joon-Woo LEE, Young-Chul PARK, Young-Jun JIN, Kyong-Min KANG, Young-Jin YOON, Suck-Jun LEE, O-Byoung KWON, In-Ho YU, Sang-Hoon JANG, Min-Ki LIM, Dong-Ki KIM