Patents by Inventor Ohad Shimon

Ohad Shimon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor edge and bevel inspection tool system
    Patent number: 11927545
    Abstract: The present disclosure relates to a novel semiconductor edge and bevel inspection tool system of a wafer comprising a first illumination setup, an imaging sensor unit, and a second illumination setup. At least a portion of the second illumination radiation is configured for interacting with at least a portion of the wafer edge and bevel region surface. The second illumination setup has different radiation parameters than the first illumination setup. The first and the second illumination radiations have substantially opposite directions.
    Type: Grant
    Filed: July 12, 2023
    Date of Patent: March 12, 2024
    Assignee: CAMTEK LTD
    Inventors: Carmel Yehuda Drillman, Mordi Dahan, Moshe Edri, Ohad Shimon, Shimon Koren