Abstract: A contamination analysis unit and method for inspecting pollutants remaining on a target side of an inspection object such as a reticle after cleaning the object is provided. After steeping the target side in a solution, a sampling liquid may be abstracted therefrom after a predetermined time and may be analyzed.

Abstract: A contamination analysis unit and method for inspecting pollutants remaining on a target side of an inspection object such as a reticle after cleaning the object is provided. After steeping the target side in a solution, a sampling liquid may be abstracted therefrom after a predetermined time and may be analyzed.

Abstract: Example embodiments of the present invention relate to an apparatus for manufacturing semiconductors and a method of inspecting a pellicle. Other example embodiments of the present invention relate to an exposure apparatus for manufacturing semiconductors. The apparatus may include a reticle, a pellicle and a reticle chuck. The reticle may be mounted on an upper surface of the reticle chuck and the pellicle may be attached to a lower surface of the reticle chuck so that the pellicle may be detached again. There may be an empty space formed between the pellicle and the reticle. The reticle chuck may include holes for supplying or exhausting a purging gas from the empty space. Because a simpler yet more efficient purging system may be installed to the reticle chuck, an effective measure may be provided against contaminations on the pattern surface of the reticle.

Abstract: The present invention relates to a method for producing target protein in plant cell culture, more particularly to the method for producing target protein comprising the steps of i) constructing vector containing SWPA2 promoter and gene for the target protein, ii) introducing said vector into Agrobacterium, iii) transforming said Agrobacterium into plant cell, and iv) mass-producing target protein using said transformed plant cells. The method of the present invention can mass-produce target proteins such as human lactoferrin. Moreover, the transformed plant can also be used to make health foods when medicinal plant is used as a host cell.

Abstract: An improved wafer transfer apparatus is provided that allows the ambient atmosphere within a modified front open unified pod (“FOUP”) while the FOUP is positioned on a loading stage provided on an equipment front end module (“EFEM”). In particular, the wafer transfer apparatus includes both an injection assembly and an exhaust assembly that will be engaged when the door of the FOUP is docked to a door holder provided on the EFEM. The injection assembly may include a mass flow controller (“MFC”) for controlling the injection of purge gas(es) into the container. Similarly, the exhaust assembly may include a MFC for controlling the removal of fluid from the container. While the door is docked to the door holder, inert or less reactive gases may be introduced into the container, thereby reducing the likelihood of oxidation or contamination of the wafers therein.

Abstract: The present invention relates to a method for producing target protein in plant cell culture, more particularly to the method for producing target protein comprising the steps of i) constructing vector containing SWPA2 promoter and gene for the target protein, ii) introducing said vector into Agrobacterium, iii) transforming said Agrobacterium into plant cell, and iv) mass-producing target protein using said transformed plant cells. The method of the present invention can mass-produce target proteins such as human lactoferrin. Moreover, the transformed plant can also be used to make health foods when medicinal plant is used as a host cell.

Abstract: A method and an apparatus for testing the filtration efficiency of cloth materials intended for use as garments, masks, or gloves in a clean room environment where semiconductor chips are fabricated. The apparatus includes a support for holding the sample of cloth material to be tested; a gas ionizer for introducing an ionized gas into a chamber; an optional humidifier for introducing water vapor into the chamber; a particle generator for introducing particles into the chamber; and a particle counting assembly for counting the number of particles introduced into the chamber before and after they pass through the sample of cloth material being tested. Particles are introduced into the chamber after the static in the chamber has been removed by ionized gas, and the temperature and humidity in the chamber have been optionally adjusted. Filtration efficiency is determined by counting the total number of particles introduced into the chamber and the number of particles that pass through a sample of cloth material.