Patents by Inventor Olaf KIEVIT

Olaf KIEVIT has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Removing particulate contaminants from the backside of a wafer or reticle
    Patent number: 10262853
    Abstract: The invention is directed to a method for removing particulate contaminants from the backside of a wafer or reticle, and to a cleaning substrate for use in such method. In the method of the invention particulate contaminants are removed from the backside of a wafer or reticle with a cleaning substrate. The cleaning substrate comprises protrusions and a tacky layer between the protrusions. The method comprises contacting the backside of the wafer or reticle with the protrusions of the cleaning substrate while maintaining a distance between the wafer or reticle and the tacky layer, the distance being in the range of 1-10 ?m.
    Type: Grant
    Filed: May 29, 2015
    Date of Patent: April 16, 2019
    Assignee: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO
    Inventors: Sjoerd Oostrom, Jacques Cor Johan Van Der Donck, Olaf Kievit, Nicole Ellen Papen-Botterhuis
  • REMOVING PARTICULATE CONTAMINANTS FROM THE BACKSIDE OF A WAFER OR RETICLE
    Publication number: 20170194134
    Abstract: The invention is directed to a method for removing particulate contaminants from the backside of a wafer or reticle, and to a cleaning substrate for use in such method. In the method of the invention particulate contaminants are removed from the backside of a wafer or reticle with a cleaning substrate. The cleaning substrate comprises protrusions and a tacky layer between the protrusions. The method comprises contacting the backside of the wafer or reticle with the protrusions of the cleaning substrate while maintaining a distance between the wafer or reticle and the tacky layer, the distance being in the range of 1-10 ?m.
    Type: Application
    Filed: May 29, 2015
    Publication date: July 6, 2017
    Applicant: Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO
    Inventors: Sjoerd OOSTROM, Jacques Cor Johan VAN DER DONCK, Olaf KIEVIT, Nicole Ellen PAPEN-BOTTERHUIS