Patents by Inventor Olav Waldimir Frijns

Olav Waldimir Frijns has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiation Source
    Publication number: 20140253894
    Abstract: A radiation source having a fuel stream generator (110) that generates and directs a fuel stream (102) along a trajectory towards a plasma formation location (104). A pre-pulse laser radiation assembly directs a first beam of laser radiation (100) at the fuel stream at the plasma formation location to generate a modified fuel target (106). A main pulse laser radiation assembly directs a second beam of laser radiation (108) at the modified fuel target at the plasma formation location to generate a radiation generating plasma (117). A collector (122) collects the radiation and directs it along an optical axis (105) of the radiation source. The first beam of laser radiation being directed toward the fuel stream substantially along the optical axis.
    Type: Application
    Filed: August 23, 2012
    Publication date: September 11, 2014
    Applicant: ASML Netherland B.V.
    Inventors: Jan Bernard Plechelmus Van Schoot, Hermanus Johannes Maria Kreuwel, Vadim Yevgenyevich Banine, Andrei Mikhailovich Yakunin, Johannes Hubertus Josephina Moors, Olav Waldimir Frijns, Gerardus Hubertus Petrus Maria Swinkels, Ivo Vanderhallen, Uwe Bruno Heini Stamm