Patents by Inventor Ole Wenzel

Ole Wenzel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9335231
    Abstract: Micro-Pirani gauge vacuum gauges are described that use low-thermal conductivity support elements. A micro-Pirani gauge or vacuum sensor can include a heating element operative to heat a gas and to produce a signal corresponding to the pressure of the gas; a platform configured to receive the heating element, with the platform having a first coefficient of thermal conductivity; and a support element connected to a substrate and configured to support the platform with the heating element within an aperture disposed in the substrate, with the support element having a second coefficient of thermal conductivity, where the second coefficient of thermal conductivity is less than the first coefficient of thermal conductivity. Multimode pressure sensing including a micro-Pirani gauge are also described.
    Type: Grant
    Filed: March 25, 2014
    Date of Patent: May 10, 2016
    Assignee: MKS Instruments, Inc.
    Inventors: Lei Gu, Stephen F. Bart, Ole Wenzel
  • Publication number: 20150276536
    Abstract: Micro-Pirani gauge vacuum gauges are described that use low-thermal conductivity support elements. A micro-Pirani gauge or vacuum sensor can include a heating element operative to heat a gas and to produce a signal corresponding to the pressure of the gas; a platform configured to receive the heating element, with the platform having a first coefficient of thermal conductivity; and a support element connected to a substrate and configured to support the platform with the heating element within an aperture disposed in the substrate, with the support element having a second coefficient of thermal conductivity, where the second coefficient of thermal conductivity is less than the first coefficient of thermal conductivity. Multimode pressure sensing including a micro-Pirani gauge are also described.
    Type: Application
    Filed: March 25, 2014
    Publication date: October 1, 2015
    Applicant: MKS Instruments, Inc.
    Inventors: Lei Gu, Stephen F. Bart, Ole Wenzel
  • Patent number: 7962294
    Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.
    Type: Grant
    Filed: January 13, 2009
    Date of Patent: June 14, 2011
    Assignee: MKS Instruments, Inc
    Inventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
  • Publication number: 20090228219
    Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
    Type: Application
    Filed: January 13, 2009
    Publication date: September 10, 2009
    Applicant: MKS INSTRUMENTS, INC.
    Inventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
  • Patent number: 7477996
    Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide a continuous absolute pressure profile over a wide range of pressures on a single integrated scale. The absolute pressure measurements and differential pressure measurements are obtained, and a correlation factor between the absolute pressure measurements and the differential pressure measurements is determined. The correlation factor is used to normalize the differential pressure measurements to virtual absolute pressure values on a common absolute pressure scale with the absolute pressure measurements. An absolute pressure profile over a wide pressure range includes the absolute pressure measurements in a portion of the range where the absolute pressure measurements are accurate, and it includes the virtual absolute pressure values in another portion of the range where the differential pressure measurements are accurate.
    Type: Grant
    Filed: June 6, 2007
    Date of Patent: January 13, 2009
    Assignee: MKS Instruments, Inc.
    Inventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
  • Publication number: 20070288179
    Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
    Type: Application
    Filed: June 6, 2007
    Publication date: December 13, 2007
    Applicant: MKS INSTRUMENTS, INC.
    Inventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
  • Publication number: 20060004539
    Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
    Type: Application
    Filed: June 21, 2005
    Publication date: January 5, 2006
    Inventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
  • Patent number: 6909975
    Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
    Type: Grant
    Filed: November 24, 2003
    Date of Patent: June 21, 2005
    Assignee: MKS Instruments, Inc.
    Inventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
  • Publication number: 20050114070
    Abstract: A method and apparatus integrates differential pressure measurements and absolute pressure measurements to provide virtual absolute pressure measurements over a wide range of pressures on a single integrated scale.
    Type: Application
    Filed: November 24, 2003
    Publication date: May 26, 2005
    Inventors: Paul Dozoretz, Youfan Gu, Garry Holcomb, Ole Wenzel
  • Patent number: 6672171
    Abstract: Transducer apparatus and method combining both an absolute pressure sensor for sensing absolute pressure in the load lock chamber and a differential pressure sensor for sensing a pressure difference between ambient atmospheric pressure and pressure in a load lock chamber and provides control signals for opening an interior door from the load lock chamber into a vacuum processing chamber and for opening an exterior door between ambient atmosphere and the load lock chamber. The transducer can also produce signals to control transition from slow to fast vacuum pump-down of load lock chamber pressure at a predetermined pressure set point.
    Type: Grant
    Filed: July 16, 2001
    Date of Patent: January 6, 2004
    Assignee: MKS Instruments, Inc.
    Inventors: Youfan Gu, Garry Holcomb, Ole Wenzel
  • Publication number: 20030010129
    Abstract: Transducer apparatus and method combining both an absolute pressure sensor for sensing absolute pressure in the load lock chamber and a differential pressure sensor for sensing a pressure difference between ambient atmospheric pressure and pressure in a load lock chamber and provides control signals for opening an interior door from the load lock chamber into a vacuum processing chamber and for opening an exterior door between ambient atmosphere and the load lock chamber. The transducer can also produce signals to control transition from slow to fast vacuum pump-down of load lock chamber pressure at a predetermined pressure set point.
    Type: Application
    Filed: July 16, 2001
    Publication date: January 16, 2003
    Inventors: Youfan Gu, Garry Holcomb, Ole Wenzel