Patents by Inventor Oleg Bly

Oleg Bly has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hydrogenated isotopically enriched boront trifluoride dopant source gas composition
    Patent number: 10920087
    Abstract: A hydrogenated isotopically enriched boron trifluoride (BF3) dopant source gas composition. The composition contains (i) boron trifluoride isotopically enriched above natural abundance in boron of atomic mass 11 (UB), and (ii) hydrogen in an amount of from 2 to 6.99 vol. %, based on total volume of boron trifluoride and hydrogen in the composition. Also described are methods of use of such dopant source gas composition, and associated apparatus therefor.
    Type: Grant
    Filed: March 27, 2017
    Date of Patent: February 16, 2021
    Assignee: ENTEGRIS, INC.
    Inventors: Steven Bishop, Sharad N. Yedave, Oleg Bly, Joseph Sweeney, Ying Tang
  • HYDROGENATED ISOTOPICALLY ENRICHED BORONT TRIFLUORIDE DOPANT SOURCE GAS COMPOSITION
    Publication number: 20190136069
    Abstract: A hydrogenated isotopically enriched boron trifluoride (BF3) dopant source gas composition. The composition contains (i) boron trifluoride isotopically enriched above natural abundance in boron of atomic mass 11 (UB), and (ii) hydrogen in an amount of from 2 to 6.99 vol. %, based on total volume of boron trifluoride and hydrogen in the composition. Also described are methods of use of such dopant source gas composition, and associated apparatus therefor.
    Type: Application
    Filed: March 27, 2017
    Publication date: May 9, 2019
    Inventors: Steven Bishop, Sharad N. Yedave, Oleg Bly, Joseph Sweeney, Ying Tang