Patents by Inventor Oliver Graw

Oliver Graw has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20200232088
    Abstract: The present disclosure provides an apparatus for vacuum deposition on a substrate. The apparatus includes a vacuum chamber having a first area and a first deposition area, one or more deposition sources at the first deposition area, wherein the one or more deposition sources are configured for vacuum deposition on at least a first substrate while the at least a first substrate is transported along a first transport direction past the one or more deposition sources, and a first substrate transport unit in the first area, wherein the first substrate transport unit is configured for moving the at least a first substrate within the first area in a first track switch direction, which is different from the first transport direction.
    Type: Application
    Filed: April 28, 2016
    Publication date: July 23, 2020
    Applicants: Applied Materials, Inc., Applied Materials, Inc.
    Inventors: John M. WHITE, Oliver GRAW
  • Publication number: 20150348811
    Abstract: A substrate processing system is provided. The substrate processing system includes a front end module, a load module, and a process module. The modules are arranged for substrate transfer between these modules along a transport direction. At least one of the front end module, load module and process module includes a transfer device providing at least two individual tracks for supporting a substrate or substrate carrier. Two or more of the at least two tracks of the transfer device may be movable relatively to each other in a switch direction perpendicular to the transport direction. At least the first load module, the second load module and the process module may each include a dual-track transfer device.
    Type: Application
    Filed: September 10, 2012
    Publication date: December 3, 2015
    Applicant: Applied Materials, Inc.
    Inventors: Oliver GRAW, Erkan KOPARAL
  • Publication number: 20150021166
    Abstract: A deposition apparatus for depositing a layer of deposition material on a substrate is provided. The apparatus includes a substrate support adapted for holding the substrate; a target support (520) adapted for holding a target assembly. The target assembly includes a backing element and at least two target elements (510, 511) arranged on the backing element next to each other so that a gap (530) is formed between the at least two target elements. The gap between the target elements is to have a width (w). Further, the substrate support and the target support are arranged with respect to each other so that the ratio of distance between substrate and target (570) element to the gap width (w) is about 150 and greater.
    Type: Application
    Filed: August 25, 2011
    Publication date: January 22, 2015
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Evelyn Scheer, Oliver Graw
  • Publication number: 20120049128
    Abstract: The present invention concerns a method for the generation of a transparent conductive oxide display coating (TCO display layer), in particular a transparent conductive oxide display coating as a transparent contact for flat panel displays and the like. The TCO display layer is generated by depositing zinc oxide and additionally aluminium, indium, gallium, boron, nitrogen, phosphorous, chlorine, fluorine or antimony or a combination thereof, with the process atmosphere containing hydrogen. These TCO layers can be realized in a particularly simple and cost-effective way compared to ITO. The properties of the inventive TCO layers are nearly as good as those for ITO, regarding high transmittance and low resistance.
    Type: Application
    Filed: October 5, 2009
    Publication date: March 1, 2012
    Applicant: Applied Materials, Inc.
    Inventors: Oliver Graw, Udo Schreiber
  • Patent number: 7977255
    Abstract: A method for forming a thin-film transistor gate insulating layer over a substrate disposed in a processing chamber is provided. The method includes: introducing a processing gas for producing a plasma in the processing chamber; heating the substrate to a substrate processing temperature of between 50 and 350° C.; and depositing silicon oxide, silicon oxynitride, or silicon nitride over the heated substrate by sputtering a target assembly at a medium frequency.
    Type: Grant
    Filed: September 16, 2010
    Date of Patent: July 12, 2011
    Assignee: Applied Materials, Inc.
    Inventors: Evelyn Scheer, Oliver Graw, Roland Weber, Udo Schreiber
  • Publication number: 20100095866
    Abstract: The present invention concerns a method for the generation of a transparent conductive oxide coating (TCO layer), in particular a transparent conductive oxide coating as a transparent contact for solar cells, flat panel displays and the like. The TCO layer is generated by depositing zinc oxide and additionally aluminium, indium, gallium, boron, nitrogen, phosphorous, chlorine, fluorine or antimony or a combination thereof, with the process atmosphere containing hydrogen. These TCO layers can be realized in a particularly simple and cost-effective way compared to ITO. The properties of the inventive TCO layers are nearly as good as those for ITO, regarding high transmittance and low resistance.
    Type: Application
    Filed: October 21, 2008
    Publication date: April 22, 2010
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Udo Schreiber, Oliver Graw