Patents by Inventor Oliver Kirch

Oliver Kirch has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 7915599
    Abstract: A radiation transducer has a luminophore layer applied on a substrate, and at least one anti-discoloration substance is applied on the luminophore layer. In a method to produce a radiation transducer a luminophore layer is applied on a substrate, and at least one anti-discoloration substance is applied on the luminophore layer after the application of the luminophore layer on the substrate.
    Type: Grant
    Filed: February 18, 2009
    Date of Patent: March 29, 2011
    Assignee: Siemens Aktiengesellschaft
    Inventors: Manfred Fuchs, Oliver Kirch, Georg Wittmann
  • Publication number: 20090206266
    Abstract: A radiation transducer has a luminophore layer applied on a substrate, and at least one anti-discoloration substance is applied on the luminophore layer. In a method to produce a radiation transducer a luminophore layer is applied on a substrate, and at least one anti-discoloration substance is applied on the luminophore layer after the application of the luminophore layer on the substrate.
    Type: Application
    Filed: February 18, 2009
    Publication date: August 20, 2009
    Inventors: Manfred Fuchs, Oliver Kirch, Georg Wittmann
  • Publication number: 20060083993
    Abstract: The invention relates to a process for the production of photomasks for structuring semiconductors. A resist that contains a polymer having silicon-containing groups is used. During the structuring in an oxygen-containing plasma, the silicon atoms are converted into silica which protects absorber parts arranged under the silica from removal by the plasma.
    Type: Application
    Filed: April 30, 2003
    Publication date: April 20, 2006
    Inventors: Oliver Kirch, Michael Sebald
  • Patent number: 6890699
    Abstract: The invention relates to a polymer obtained by copolymerization of a first comonomer having a group catalytically cleavable by acid, a second comonomer having an anchor group for the subsequent linkage of an amplification agent, and a third comonomer having a carboxyl group being esterified with an alkyl group. It is also possible for one or more carbon atoms in the alkyl group to be replaced by oxygen. The polymer may also include fourth comonomers that include silicon-containing groups. By using the alkyl or alkoxyalkyleneoxy side groups introduced with the third comonomer, the glass transition temperature of the polymer can be reduced so that a photoresist containing the polymer provides a homogeneous polymer film on heating.
    Type: Grant
    Filed: February 28, 2003
    Date of Patent: May 10, 2005
    Assignee: Infineon Technologies AG
    Inventors: Kerstin Seibold, Oliver Kirch
  • Publication number: 20030162411
    Abstract: The invention relates to a polymer obtained by copolymerization of a first comonomer having a group catalytically cleavable by acid, a second comonomer having an anchor group for the subsequent linkage of an amplification agent, and a third comonomer having a carboxyl group being esterified with an alkyl group. It is also possible for one or more carbon atoms in the alkyl group to be replaced by oxygen. The polymer may also include fourth comonomers that include silicon-containing groups. By using the alkyl or alkoxyalkyleneoxy side groups introduced with the third comonomer, the glass transition temperature of the polymer can be reduced so that a photoresist containing the polymer provides a homogeneous polymer film on heating.
    Type: Application
    Filed: February 28, 2003
    Publication date: August 28, 2003
    Inventors: Kerstin Seibold, Oliver Kirch