Patents by Inventor Oliver Knieling

Oliver Knieling has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130220364
    Abstract: Methods and apparatus for the cleaning reactor box chambers using molecular fluorine as the cleaning material. The molecular fluorine is dissociated in-situ in the chamber using the chamber RF power source.
    Type: Application
    Filed: August 11, 2011
    Publication date: August 29, 2013
    Inventors: Jean-Charles Cigal, Stefan Petri, Paul Alan Stockman, Oliver Knieling