Abstract: An apparatus (1) and a process for the surface coating of workpieces (3), having an applicator nozzle (2) for applying a coating agent to a surface of the workpiece (3) which is to be coated, and having a suction device for discharging the air laden with coating agent vapors and/or coating agent mists, wherein the applicator nozzle (2) and the workpiece (3) are movable relative to one another. A suction bell (4), which engages over an applicator nozzle opening (9) of the applicator nozzle (2) and is rigidly connected to an applicator nozzle wall (14) of the applicator nozzle (2), is arranged downstream of the applicator nozzle (2). The suction bell (4) is a short distance from the workpiece (3) and comprises an inner bell (5) and an outer bell (6), the inner bell (5) delimits a spraying space (7) and the outer bell (6) forms a suction space (8) with a suction intake opening (10) between itself and the inner bell (5).

Abstract: An SPM sensor (1) for a scanning probe microscope with a cantilever (3), a holding element (2) at one end of the cantilever (3) and a sensor tip (4) at the other end of the cantilever (3) and to a method for producing sensors of this type. The EBD structure (5) is anchored directly in the substrate of the sensor tip (4). The anchoring of the EBD structure (5) takes place with positive and nonpositive engagement in a hole (6) in the sensor tip (4), which is created by material removal in the substrate of the sensor tip (4). The method comprises the creation of the EBD structure by particle beam induced material deposition in the hole of the sensor tip.