Abstract: Throughput of manufacturing thin-film solar panels by inline technique is made substantially independent from the time extent of different surface treatment steps by accordingly subdividing treatment steps in sub-steps performed in inline subsequent treatment stations. Treatment duration in each of the subsequent treatment stations is equal(?).

Abstract: A touch screen and a method to manufacture a touch screen having a substrate and a patterned transparent conductor layer. The color difference between substrate areas with and without coverage by the transparent conductor layer with respect to both reflectance and transmittance is reduced by an intermediate layer stack (IL) disposed between the substrate and the transparent conductor layer. The intermediate layer stack includes a plurality of at least two alternating high refractive index and low refractive index materials. In a second embodiment of a touch screen and a method to manufacture a touch screen, a capping layer (CL) is situated on top of the patterned transparent conductor layer and the intermediate layer (IL) where it is not covered by the patterned transparent conductor layer.

Abstract: So as to provide a target arrangement with improved mounting and dismounting ability, the target arrangement comprises a plate along a plane (E) which has a border (7) defined by a first wedge surface (5u) angled to the addressed general plane (E) and a second wedge surface (5l) which is substantially planar as well and angled with respect to the generic plane (E). The two wedge surfaces mutually convert in a direction along the addressed plane (E) and from a more central area of the plate outwardly.

Abstract: A method for the deposition of an anti-reflection film on a substrate is disclosed. A substrate including a plurality of solar cell structures is provided and placed in a vacuum chamber with a target including silicon. A flow of a nitrogen-containing reactive gas into the vacuum chamber is set to a first value while a voltage between the target and ground is switched off and then increased to a second value. A voltage is applied between the target and ground, whereby a film of silicon and nitrogen is deposited on the substrate in a flow of the nitrogen-containing reactive gas which is higher than the first value.

Abstract: Throughput of manufacturing thin-film solar panels by inline technique is made substantially independent from the time extent of different surface treatment steps by accordingly subdividing treatment steps in sub-steps performed in inline subsequent treatment stations. Treatment duration in each of the subsequent treatment stations is equal (?).

Abstract: A method for the deposition of an anti-reflection film on a substrate is disclosed. A substrate including a plurality of solar cell structures is provided and placed in a vacuum chamber with a target including silicon. A flow of a nitrogen-containing reactive gas into the vacuum chamber is set to a first value while a voltage between the target and ground is switched off and then increased to a second value. A voltage is applied between the target and ground, whereby a film of silicon and nitrogen is deposited on the substrate in a flow of the nitrogen-containing reactive gas which is higher than the first value.

Abstract: In an apparatus for controlling a gas-rise pattern in a vacuum treatment process a gas inlet (1) is operatively connected with a mass-flow-controller MFC (2); said MFC (2) being again operatively connected via a first valve (5) with a vacuum chamber (3) and in parallel via second valve (6) with a vent-line (4). Said connection with the vent-line (4) further comprises means for varying the pump cross section of said vent-line (4). In another embodiment the apparatus for controlling a gas-rise pattern in a vacuum treatment process comprises a gas inlet (13) operatively connected with a vacuum chamber (3) via a valve (11), wherein the connection between gas inlet (13) and valve (11) further comprises a diaphragm (12).

Abstract: So as to provide a target arrangement with improved mounting and dismounting ability, the target arrangement comprises a plate along a plane (E) which has a border (7) defined by a first wedge surface (5u) angled to the addressed general plane (E) and a second wedge surface (5l) which is substantially planar as well and angled with respect to the generic plane (E). The two wedge surfaces mutually convert in a direction along the addressed plane (E) and from a more central area of the plate outwardly.

Abstract: In a substrate processing system for the treatment of substrates in vacuum two linear assemblies of process modules are stacked one above the other and connected by at least one lift module allowing for the transport from the first set to the second set. Along the traveling path through the first and second set of process modules there is arranged a linear synchronous motor. A substrate carrier with rails interacting with rollers mounted in the processing system is being held by the attractive forces of said linear synchronous motor in vertical position.