Abstract: Pressure and temperature inside a high-pressure container (common rail) are measured by means an ultrasonic emitter or an ultrasonic receiver which can detect the pressure inside the high-pressure container in a medium on the basis of the transit time of a pressure pulse. To this end, the ultrasonic receiver receives the pressure pulse, which propagates inside an additional element that is disposed between the ultrasonic emitter or ultrasonic receiver and the medium, and this propagation is ascertained accordingly in order to calculate a temperature from it.

Abstract: A combined pressure and temperature sensor for recording the pressure and the temperature of a medium. A sensor element of the combined pressure and temperature sensor includes a through-hole to a diaphragm and a bore for accommodating a temperature sensor. The diaphragm cooperates with a pressure sensor. At an end face of the sensor element, on the side of the medium, a cover is fastened, in which a hollow space is developed to accommodate the temperature sensor.

Abstract: A method for producing a component is provided, in particular a deformation sensor, having a sensor element which includes at least one region that is sensitive with respect to expansion or compression, as well as electrical structures which are in connection therewith. To this end, a sacrificial layer is produced on or within a substrate and an activatable layer on top of the sacrificial layer, the sensitive region and at least a portion of the electrical structures being positioned on top or within an activatable layer, and a circumferential trench is produced around the region of the sensor element to be produced and having the sensitive region and the portion of the electrical structures, the trench being interrupted by at least one connecting point, which connects the region of the sensor element to the portion of the activatable layer lying outside the circumferential trench.

Abstract: The invention relates to an economical pressure measuring device as well as to a favorable method for pressure determination, with which a pressure measurement can be performed from outside the high-pressure container. To that end, the device comprises an ultrasound transmitter mounted outside the pressure container and an ultrasound receiver by means of which transmitter and receiver the transit time of an ultrasonic pulse traveling through the liquid contained in the high-pressure container can be ascertained, and the method comprises generating an ultrasonic pulse outside the high-pressure container measuring the time that the ultrasonic pulse requires to traverse a defined distance calculating the pulse speed of the pulse in the liquid; and from that determining the pressure in the liquid.

Abstract: A combined pressure and temperature sensor for recording the pressure and the temperature of a medium. A sensor element of the combined pressure and temperature sensor includes a through-hole to a diaphragm and a bore for accommodating a temperature sensor. The diaphragm cooperates with a pressure sensor. At an end face of the sensor element, on the side of the medium, a cover is fastened, in which a hollow space is developed to accommodate the temperature sensor.

Abstract: A capacitive pressure sensor made up of two silicon on insulator (SOI) wafers lying opposite of each other and joined to each other in a vacuum-tight manner, a recess being formed between the two wafers. The first wafer exclusively supports the evaluation circuits required for measuring the applied pressure and a capacitive electrode, and the second wafer has a recess formed by surface micromechanics processes, in which the counter electrode to the capacitive electrode of the first wafer is situated. The second wafer at the same time forms a cover for the first wafer.

Abstract: The invention relates to an economical pressure measuring device as well as to a favorable method for pressure determination, with which a pressure measurement can be performed from outside the high-pressure container. To that end, the device comprises an ultrasound transmitter mounted outside the pressure container and an ultrasound receiver by means of which transmitter and receiver the transit time of an ultrasonic pulse traveling through the liquid contained in the high-pressure container can be ascertained, and the method comprises generating an ultrasonic pulse outside the high-pressure container measuring the time that the ultrasonic pulse requires to traverse a defined distance calculating the pulse speed of the pulse in the liquid; and from that determining the pressure in the liquid.

Abstract: A method for producing a component is provided, in particular a deformation sensor, having a sensor element which includes at least one region that is sensitive with respect to expansion or compression, as well as electrical structures which are in connection therewith. To this end, a sacrificial layer is produced on or within a substrate and an activatable layer on top of the sacrificial layer, the sensitive region and at least a portion of the electrical structures being positioned on top or within an activatable layer, and a circumferential trench is produced around the region of the sensor element to be produced and having the sensitive region and the portion of the electrical structures, the trench being interrupted by at least one connecting point, which connects the region of the sensor element to the portion of the activatable layer lying outside the circumferential trench.

Abstract: A capacitive pressure sensor made up of two silicon on insulator (SOI) wafers lying opposite of each other and joined to each other in a vacuum-tight manner, a recess being formed between the two wafers. The first wafer exclusively supports the evaluation circuits required for measuring the applied pressure and a capacitive electrode, and the second wafer has a recess formed by surface micromechanics processes, in which the counter electrode to the capacitive electrode of the first wafer is situated. The second wafer at the same time forms a cover for the first wafer.

Abstract: A device for measuring a force, for example a pressure in a predefined direction, wherein a substrate is provided with a main substrate plane, and the direction is parallel to the main substrate plane.

Abstract: A method for manufacturing a micromechanical pressure sensor and a pressure sensor manufactured using this method. The pressure is measured in the pressure sensor composed of at least two components via a capacitance measurement of a capacitor, the pressure sensor having at least one first electrode and one first diaphragm. The movement of the diaphragm causes a change in the capacitance of the capacitor which may be used in the capacitance measurement as a measure for the pressure variable to be measured. It is important that, prior to assembly, the first and the second components of the pressure sensor be processed separately. The first component has at least one semiconductor material and the first electrode, whereas the second component is made of metal, at least in part, and contains at least the first diaphragm.

Abstract: A device or a pressure sensor for measuring a force or for measuring a pressure in a predefined direction. A packaging element, as well as a carrier element, and a sensor element are substantially compensated in relation to the sensing region of the sensor element with respect to their temperature-induced expansions.