Patents by Inventor Oliver Vatel

Oliver Vatel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for heating a semiconductor wafer in a process chamber by a shower head, and process chamber
    Patent number: 6290491
    Abstract: Heating (200) a semiconductor wafer (150) in a process chamber (100) is performed in the order of: placing (210) the wafer (100) with the backside (152) on a plurality of support elements (112) that extend from a chuck (100); ejecting (220) a heating gas (122, He) from a shower head (120) located within the process chamber (100) to the frontside (151) of the wafer (150); and moving (230) the support elements (112) into recesses (111) within the chuck (100) to that the wafer backside (152) touches the chuck (110).
    Type: Grant
    Filed: June 29, 2000
    Date of Patent: September 18, 2001
    Assignees: Motorola, Inc., Semiconductor 300 GmbH & Co. KG, Infineon Technologies AG
    Inventors: Iraj Shahvandi, Oliver Vatel, Peggy John
  • Method for cleaning a throttle valve and apparatus
    Patent number: 6217660
    Abstract: An improved method of cleaning a throttle valve and an apparatus for facilitating such cleaning. The method of cleaning a throttle valve is provided by applying ultrasonic wave to the throttle valve. The throttle valve is juxtaposed in close proximity to the exhaust gas port of the reaction chamber. A cleaning gas of nitrogen is used to clean the throttle valve. The throttle valve is heated by an imbedded control heater.
    Type: Grant
    Filed: April 3, 2000
    Date of Patent: April 17, 2001
    Assignee: Motorola Inc.
    Inventors: Iraj Shahvandi, Leroy Grant, Oliver Vatel