Patents by Inventor Olivier Diop

Olivier Diop has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Monitoring method of an ion implantation process
    Patent number: 6141103
    Abstract: A method is to characterize a process of ion implantation and includes a step of the measurement, by a spectroscopic ellipsometer, of the ellipsometric parameters (tan.psi., cos.delta.)of a film of organic resin present on the surface of a wafer that has received ion bombardment. The film of resin includes at least one upper layer of carbonized or damaged resin.
    Type: Grant
    Filed: March 17, 1999
    Date of Patent: October 31, 2000
    Assignee: STMicroelectronics S.A.
    Inventors: Jacques Pinaton, Olivier Diop, Pascal Lambert