Patents by Inventor Olivier G. Vatel

Olivier G. Vatel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor wafer processing apparatus and method therefor
    Publication number: 20040221871
    Abstract: A semiconductor wafer processing apparatus (10) includes a front-end robot (28), a wafer scrubber/dryer (30), a moisture detector (34) and a load/lock chamber (38, 40). The front-end robot (28) moves a wafer to be processed between the wafer cassette (21-24), the wafer scrubber (30), the moisture detector (34) and the load/lock chamber (38, 40). Optionally, the load/lock chamber (38, 40) may include an additional moisture detector. The load/lock chamber (38, 40) functions as an interface to a vacuum processing chamber (50, 52, 54) for performing various deposition processing steps where introduction of moisture would be destructive to the wafer.
    Type: Application
    Filed: May 7, 2003
    Publication date: November 11, 2004
    Inventors: Matthew F. Fletcher, Lesley A. Smith, Olivier G. Vatel, Olubunmi O. Adetutu