Abstract: A multi-channel disc valve assembly including: a first inlet chamber having a first inlet port; a second inlet chamber having a second inlet port; a multi-channel mixing chamber body having at least one first chamber opening fluidly communicable with the first inlet chamber and at least one second chamber opening fluidly communicable with the second inlet chamber; a first disc valve sub-assembly positioned between the first inlet chamber and the multi-channel mixing chamber body, the first disc valve sub-assembly including a first movable disc; and a second disc valve sub-assembly positioned between the second inlet chamber and the multi-channel mixing chamber body, the second disc valve sub-assembly including a second movable disc; the first and second movable discs being rotatable to respectively alter fluid flow pathways from the first inlet chamber to the multi-channel mixing chamber body and from the second inlet chamber to the multi-channel mixing chamber body.

Abstract: The invention relates to a method of forming a surface texture on a process chamber component in the form of an annular shield element for use in a substrate processing chamber which is designed for manufacturing wafers, chips or dies, the process chamber component forming a shield element and having at least one component surface, the method comprising the step of forming the surface texture on the at least one component surface so as to define at least one recess in the surface texture and that the total surface area defined by the surface texture is greater than the total surface area defined by the at least one component surface, wherein the surface texture is applied to the at least one component surface by additive manufacturing. Furthermore, an improved process chamber component is proposed.

Abstract: A multi-channel disc valve assembly including: a first inlet chamber having a first inlet port; a second inlet chamber having a second inlet port; a multi-channel mixing chamber body having at least one first chamber opening fluidly communicable with the first inlet chamber and at least one second chamber opening fluidly communicable with the second inlet chamber; a first disc valve sub-assembly positioned between the first inlet chamber and the multi-channel mixing chamber body, the first disc valve sub-assembly including a first movable disc; and a second disc valve sub-assembly positioned between the second inlet chamber and the multi-channel mixing chamber body, the second disc valve sub-assembly including a second movable disc; the first and second movable discs being rotatable to respectively alter fluid flow pathways from the first inlet chamber to the multi-channel mixing chamber body and from the second inlet chamber to the multi-channel mixing chamber body.