Patents by Inventor Olivier Maurin

Olivier Maurin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photolithographic method producing sub-micron patterns in the manufacture of electronic microcircuits
    Patent number: 4816377
    Abstract: A high-resolution photosensitive composition which can be plasma-developed, including an acrylic a polymer and a photosensitive compound, of the aromatic azide group, in which the polymer contains, in a side chain, at least one aromatic nucleus where at least one chlorine atom (Cl) has replaced at least one hydrogen atom (H), for example ##STR1##
    Type: Grant
    Filed: January 7, 1988
    Date of Patent: March 28, 1989
    Assignee: U.S. Philips Corporation
    Inventors: Andre Collet, Serge Gourrier, Olivier Maurin
  • High-resolution photosensitive composition which can be developed by plasma and a photolithographic method of using said composition
    Patent number: 4741986
    Abstract: A high-resolution photosensitive composition which can be plasma-developed, including an acrylic polymer and a photosensitive compound, of the aromatic azide group, in which the polymer contains, in a side chain, at least one aromatic nucleus where at least one chlorine atom (Cl) has replaced at least one hydrogen atom (H) for example ##STR1##
    Type: Grant
    Filed: June 16, 1986
    Date of Patent: May 3, 1988
    Assignee: U.S. Philips Corp.
    Inventors: Andre Collet, Serge Gourrier, Olivier Maurin