Patents by Inventor Olof C. Hellman

Olof C. Hellman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Oxides and nitrides of metastabale group IV alloys and nitrides of Group IV elements and semiconductor devices formed thereof
    Patent number: 5241214
    Abstract: A process and resultant devices is described for forming MOSFET, CMOS and BICMOS devices of Group IV alloys, in particular Si.sub.x Ge.sub.1-x wherein 0<x<1, using ion beam oxidation (IBO) or ion beam nitridation (IBN) by CIMD to form insulators of the Group IV alloys.
    Type: Grant
    Filed: April 29, 1991
    Date of Patent: August 31, 1993
    Assignee: Massachusetts Institute of Technology
    Inventors: Nicole Herbots, Olof C. Hellman, Olivier P. J. Vancauwenberghe
  • Combined ion and molecular beam apparatus and method for depositing materials
    Patent number: 4800100
    Abstract: A method and apparatus is described for combined deposition of thin films of materials from an ion beam source and a molecular beam source in a single reactor.
    Type: Grant
    Filed: October 27, 1987
    Date of Patent: January 24, 1989
    Assignee: Massachusetts Institute of Technology
    Inventors: Nicole Herbots, Olof C. Hellman