Abstract: A computing system implementing a physical verification tool can identify edges of a geometric pattern located within a search area surrounding a point of interest in a semiconductor layout design, characterize the edges of the geometric pattern based on locations of center points of the edges from the point of interest within the search area, and generate geometrical feature vectors for the point of interest in the semiconductor layout design based on the characterization of the edges of the geometric pattern. The computing system can reconstruct the semiconductor layout design corresponding to the search area surrounding the point of interest using the geometrical feature vectors for the point of interest in the semiconductor layout design.

Abstract: A method for backlash compensation in motion control systems includes homing a payload of a motion control system, and performing a tooth-pitch non-uniformity procedure on the motion control system to identify a non-uniformity correction. A backlash lookup table is generated for use in backlash correction during normal operation of the motion control system. The backlash lookup table is generated using a training process that includes selecting a move sequence for operating the motion control system, and executing the move sequence with the non-uniformity correction. The training process further includes computing a backlash measurement describing backlash of one or more components of the motion control system during the move sequence, and storing the backlash measurement in the backlash lookup table.