Patents by Inventor Omar Serna

Omar Serna has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reliable particle removal following a process chamber wet clean
    Patent number: 6472326
    Abstract: Aspects for more reliable particle removal from a semiconductor processing chamber following a chamber wet clean are described. With the present invention, an improved particle removal following wet cleans of semiconductor processing chambers occurs. The present invention creates a turbulent gas flow in a chamber in order to more thoroughly remove particles from the chamber, including those that the wet clean procedures cannot reach. In a straightforward and efficient manner, the turbulent gas flow is created by providing gas in both an upper and lower portion of the chamber substantially simultaneously, including the advantageous use of the backside helium available to chamber processing.
    Type: Grant
    Filed: October 2, 2000
    Date of Patent: October 29, 2002
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Allison Holbrook, Greg A. Johnson, Darlene Smith, Omar Serna, Theodros W. Mariam