Patents by Inventor Omar Zurita
Omar Zurita has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11650190Abstract: A method for retrieving a corrected spectrum from a measured spectrum (e.g., retrieving a top-of-water spectrum from a measured top-of-atmosphere spectrum) includes creating a scene-specific model of a region of interest and performing a ray-tracing simulation to simulate rays of light that would reach an airborne (or spaceborne) sensor. The region of interest can be an optically complex area such as an inland or coastal body of water. Based on the ray-tracing simulation, a scene-specific correction for unwanted effects (e.g., adjacency effects, variable atmospheric conditions, and/or other suitable effects) is obtained. A corrected spectrum is obtained by correcting the measured spectrum using the scene-specific correction. The ray-tracing simulation may be performed using a graphical processing unit, allowing the scene-specific correction to be performed in real time or near real time.Type: GrantFiled: October 2, 2020Date of Patent: May 16, 2023Assignee: Flying Gybe Inc.Inventors: Nicholas Tufillaro, Philipp Grötsch, Ivan Lalović, Omar Zurita
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Publication number: 20210231497Abstract: A hyperspectral sensing device may include an optical collector configured to collect light and to transfer the collected light to a sensor having spectral resolution sufficient for sensing hyperspectral data. In some examples, the sensor comprises a compact spectrometer. The device further comprises a power supply, an electronics module, and an input/output hub enabling the device to transmit acquired data (e.g., to a remote server). In some examples, a plurality of hyperspectral sensing devices are deployed as a network to acquire data over a relatively large area. Methods are disclosed for performing dark-current calibration and/or radiometric calibration on data obtained by the hyperspectral sensing device, and/or another suitable device. Data obtained by the device may be represented in a functional basis space, enabling computations that utilize all of the hyperspectral data without loss of information.Type: ApplicationFiled: April 14, 2021Publication date: July 29, 2021Inventors: Nicholas TUFILLARO, Ivan LALOVIC, Omar ZURITA
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Publication number: 20210231498Abstract: A hyperspectral sensing device may include an optical collector configured to collect light and to transfer the collected light to a sensor having spectral resolution sufficient for sensing hyperspectral data. In some examples, the sensor comprises a compact spectrometer. The device further comprises a power supply, an electronics module, and an input/output hub enabling the device to transmit acquired data (e.g., to a remote server). In some examples, a plurality of hyperspectral sensing devices are deployed as a network to acquire data over a relatively large area. Methods are disclosed for performing dark-current calibration and/or radiometric calibration on data obtained by the hyperspectral sensing device, and/or another suitable device. Data obtained by the device may be represented in a functional basis space, enabling computations that utilize all of the hyperspectral data without loss of information.Type: ApplicationFiled: April 14, 2021Publication date: July 29, 2021Inventors: Nicholas TUFILLARO, Ivan LALOVIC, Omar ZURITA
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Patent number: 11073423Abstract: A hyperspectral sensing device may include an optical collector configured to collect light and to transfer the collected light to a sensor having spectral resolution sufficient for sensing hyperspectral data. In some examples, the sensor comprises a compact spectrometer. The device further comprises a power supply, an electronics module, and an input/output hub enabling the device to transmit acquired data (e.g., to a remote server). In some examples, a plurality of hyperspectral sensing devices are deployed as a network to acquire data over a relatively large area. Methods are disclosed for performing dark-current calibration and/or radiometric calibration on data obtained by the hyperspectral sensing device, and/or another suitable device. Data obtained by the device may be represented in a functional basis space, enabling computations that utilize all of the hyperspectral data without loss of information.Type: GrantFiled: September 25, 2019Date of Patent: July 27, 2021Assignee: Flying Gybe Inc.Inventors: Nicholas Tufillaro, Ivan Lalovic, Omar Zurita
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Publication number: 20210033589Abstract: A method for retrieving a corrected spectrum from a measured spectrum (e.g., retrieving a top-of-water spectrum from a measured top-of-atmosphere spectrum) includes creating a scene-specific model of a region of interest and performing a ray-tracing simulation to simulate rays of light that would reach an airborne (or spaceborne) sensor. The region of interest can be an optically complex area such as an inland or coastal body of water. Based on the ray-tracing simulation, a scene-specific correction for unwanted effects (e.g., adjacency effects, variable atmospheric conditions, and/or other suitable effects) is obtained. A corrected spectrum is obtained by correcting the measured spectrum using the scene-specific correction. The ray-tracing simulation may be performed using a graphical processing unit, allowing the scene-specific correction to be performed in real time or near real time.Type: ApplicationFiled: October 2, 2020Publication date: February 4, 2021Inventors: Nicholas TUFILLARO, Philipp GRÖTSCH, Ivan LALOVIC, Omar ZURITA
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Patent number: 10845711Abstract: Methods and apparatus for processing an image of a beam generated by an optical system to extract information indicative of an extent of damage to optical elements in the optical system. Also disclosed is a beam image and analysis tool capable of acquiring an image of a beam at any one of a number of locations.Type: GrantFiled: June 13, 2019Date of Patent: November 24, 2020Assignee: Cymer, LLCInventors: Thomas Frederick Allen Bibby, Jr., Omar Zurita, Abhishek Subramanian, Thomas Patrick Duffey
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Publication number: 20200025613Abstract: A hyperspectral sensing device may include an optical collector configured to collect light and to transfer the collected light to a sensor having spectral resolution sufficient for sensing hyperspectral data. In some examples, the sensor comprises a compact spectrometer. The device further comprises a power supply, an electronics module, and an input/output hub enabling the device to transmit acquired data (e.g., to a remote server). In some examples, a plurality of hyperspectral sensing devices are deployed as a network to acquire data over a relatively large area. Methods are disclosed for performing dark-current calibration and/or radiometric calibration on data obtained by the hyperspectral sensing device, and/or another suitable device. Data obtained by the device may be represented in a functional basis space, enabling computations that utilize all of the hyperspectral data without loss of information.Type: ApplicationFiled: September 25, 2019Publication date: January 23, 2020Inventors: Nicholas TUFILLARO, Ivan LALOVIC, Omar ZURITA
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Publication number: 20190310558Abstract: Methods and apparatus for processing an image of a beam generated by an optical system to extract information indicative of an extent of damage to optical elements in the optical system. Also disclosed is a beam image and analysis tool capable of acquiring an image of a beam at any one of a number of locations.Type: ApplicationFiled: June 13, 2019Publication date: October 10, 2019Inventors: Thomas Frederick Allen Bibby, JR., Omar Zurita, Abhishek Subramanian, Thomas Patrick Duffey
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Patent number: 10345714Abstract: Methods and apparatus for processing an image of a beam generated by an optical system to extract information indicative of an extent of damage to optical elements in the optical system. Also disclosed is a beam image and analysis tool capable of acquiring an image of a beam at any one of a number of locations.Type: GrantFiled: June 12, 2017Date of Patent: July 9, 2019Assignee: Cymer, LLCInventors: Thomas Frederick Allen Bibby, Jr., Omar Zurita, Abhishek Subramanian, Thomas Patrick Duffey
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Patent number: 10268123Abstract: A photolithography method includes producing, from an optical source, a pulsed light beam; and scanning the pulsed light beam across a substrate of a lithography exposure apparatus to expose the substrate with the pulsed light beam including exposing each sub-area of the substrate with the pulsed light beam. A sub-area is a portion of a total area of the substrate. For each sub-area of the substrate, a lithography performance parameter associated with the sub-area of the substrate is received; the received lithography performance parameter is analyzed, and, based on the analysis, a first spectral feature of the pulsed light beam is modified and a second spectral feature of the pulsed light beam is maintained.Type: GrantFiled: February 12, 2018Date of Patent: April 23, 2019Assignee: Cymer, LLCInventors: Eric Anders Mason, Omar Zurita, Gregory Allen Rechtsteiner, Willard Earl Conley
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Patent number: 10036960Abstract: A photolithography method includes instructing an optical source to produce a pulsed light beam; scanning the pulsed light beam across a wafer of a lithography exposure apparatus to expose the wafer with the pulsed light beam; during scanning of the pulsed light beam across the wafer, receiving a characteristic of the pulsed light beam at the wafer; receiving a determined value of a physical property of a wafer for a particular pulsed light beam characteristic; and based on the pulsed light beam characteristic that is received during scanning and the received determined value of the physical property, modifying a performance parameter of the pulsed light beam during scanning across the wafer.Type: GrantFiled: June 20, 2017Date of Patent: July 31, 2018Assignee: Cymer, LLCInventors: Ivan Lalovic, Omar Zurita, Gregory Allen Rechtsteiner, Paolo Alagna, Simon Hsieh, Jason J. Lee, Rostislav Rokitski, Rui Jiang
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Publication number: 20180164697Abstract: A photolithography method includes producing, from an optical source, a pulsed light beam; and scanning the pulsed light beam across a substrate of a lithography exposure apparatus to expose the substrate with the pulsed light beam including exposing each sub-area of the substrate with the pulsed light beam. A sub-area is a portion of a total area of the substrate. For each sub-area of the substrate, a lithography performance parameter associated with the sub-area of the substrate is received; the received lithography performance parameter is analyzed, and, based on the analysis, a first spectral feature of the pulsed light beam is modified and a second spectral feature of the pulsed light beam is maintained.Type: ApplicationFiled: February 12, 2018Publication date: June 14, 2018Inventors: Eric Anders Mason, Omar Zurita, Gregory Allen Rechtsteiner, Willard Earl Conley
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Patent number: 9989866Abstract: A photolithography method includes producing, from an optical source, a pulsed light beam; and scanning the pulsed light beam across a substrate of a lithography exposure apparatus to expose the substrate with the pulsed light beam including exposing each sub-area of the substrate with the pulsed light beam. A sub-area is a portion of a total area of the substrate. For each sub-area of the substrate, a lithography performance parameter associated with the sub-area of the substrate is received; the received lithography performance parameter is analyzed, and, based on the analysis, a first spectral feature of the pulsed light beam is modified and a second spectral feature of the pulsed light beam is maintained.Type: GrantFiled: October 17, 2016Date of Patent: June 5, 2018Assignee: Cymer, LLCInventors: Eric Anders Mason, Omar Zurita, Gregory Allen Rechtsteiner, Willard Earl Conley
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Publication number: 20180107123Abstract: A photolithography method includes producing, from an optical source, a pulsed light beam; and scanning the pulsed light beam across a substrate of a lithography exposure apparatus to expose the substrate with the pulsed light beam including exposing each sub-area of the substrate with the pulsed light beam. A sub-area is a portion of a total area of the substrate. For each sub-area of the substrate, a lithography performance parameter associated with the sub-area of the substrate is received; the received lithography performance parameter is analyzed, and, based on the analysis, a first spectral feature of the pulsed light beam is modified and a second spectral feature of the pulsed light beam is maintained.Type: ApplicationFiled: October 17, 2016Publication date: April 19, 2018Inventors: Eric Anders Mason, Omar Zurita, Gregory Allen Rechtsteiner, Willard Earl Conley
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Publication number: 20180017878Abstract: Methods and apparatus for processing an image of a beam generated by an optical system to extract information indicative of an extent of damage to optical elements in the optical system. Also disclosed is a beam image and analysis tool capable of acquiring an image of a beam at any one of a number of locations.Type: ApplicationFiled: June 12, 2017Publication date: January 18, 2018Inventors: Thomas Frederick Allen Bibby, JR., Omar Zurita, Abhishek Subramanian, Thomas Patrick Duffey
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Publication number: 20180011409Abstract: A photolithography method includes instructing an optical source to produce a pulsed light beam; scanning the pulsed light beam across a wafer of a lithography exposure apparatus to expose the wafer with the pulsed light beam; during scanning of the pulsed light beam across the wafer, receiving a characteristic of the pulsed light beam at the wafer; receiving a determined value of a physical property of a wafer for a particular pulsed light beam characteristic; and based on the pulsed light beam characteristic that is received during scanning and the received determined value of the physical property, modifying a performance parameter of the pulsed light beam during scanning across the wafer.Type: ApplicationFiled: June 20, 2017Publication date: January 11, 2018Inventors: Ivan Lalovic, Omar Zurita, Gregory Allen Rechtsteiner, Paolo Alagna, Simon Hsieh, Jason J. Lee, Rostislav Rokitski, Rui Jiang
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Patent number: 9715180Abstract: A photolithography method includes instructing an optical source to produce a pulsed light beam; scanning the pulsed light beam across a wafer of a lithography exposure apparatus to expose the wafer with the pulsed light beam; during scanning of the pulsed light beam across the wafer, receiving a characteristic of the pulsed light beam at the wafer; receiving a determined value of a physical property of a wafer for a particular pulsed light beam characteristic; and based on the pulsed light beam characteristic that is received during scanning and the received determined value of the physical property, modifying a performance parameter of the pulsed light beam during scanning across the wafer.Type: GrantFiled: June 4, 2014Date of Patent: July 25, 2017Assignee: Cymer, LLCInventors: Ivan Lalovic, Omar Zurita, Gregory Allen Rechtsteiner, Paolo Alagna, Simon Hsieh, Jason J. Lee, Rostislav Rokitski, Rui Jiang
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Patent number: 9709897Abstract: A photolithography system includes an optical system, an actuation apparatus, and a control module. The optical system includes an optical source that produces a pulsed light beam traveling along a beam path; a plurality of optical components positioned between the optical source and a photolithography exposure apparatus, at least some of the plurality of optical components configured to receive the pulsed light beam and direct the pulsed light beam to the photolithography exposure apparatus; and an optical element positioned to interact with the pulsed light beam. The actuation apparatus is coupled to the optical element. The actuation apparatus is configured to adjust a physical property of the optical element based on a control signal from the control module to thereby adjust a polarization of the pulsed light beam.Type: GrantFiled: October 28, 2015Date of Patent: July 18, 2017Assignee: Cymer, LLCInventors: Eric Anders Mason, Omar Zurita, Gregory Allen Rechtsteiner, Robert Jay Rafac, Ivan B. Lalovic
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Publication number: 20170123324Abstract: A photolithography system includes an optical system, an actuation apparatus, and a control module. The optical system includes an optical source that produces a pulsed light beam traveling along a beam path; a plurality of optical components positioned between the optical source and a photolithography exposure apparatus, at least some of the plurality of optical components configured to receive the pulsed light beam and direct the pulsed light beam to the photolithography exposure apparatus; and an optical element positioned to interact with the pulsed light beam. The actuation apparatus is coupled to the optical element. The actuation apparatus is configured to adjust a physical property of the optical element based on a control signal from the control module to thereby adjust a polarization of the pulsed light beam.Type: ApplicationFiled: October 28, 2015Publication date: May 4, 2017Inventors: Eric Anders Mason, Omar Zurita, Gregory Allen Rechtsteiner, Robert Jay Rafac, Ivan B. Lalovic
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Publication number: 20150070673Abstract: A photolithography method includes instructing an optical source to produce a pulsed light beam; scanning the pulsed light beam across a wafer of a lithography exposure apparatus to expose the wafer with the pulsed light beam; during scanning of the pulsed light beam across the wafer, receiving a characteristic of the pulsed light beam at the wafer; receiving a determined value of a physical property of a wafer for a particular pulsed light beam characteristic; and based on the pulsed light beam characteristic that is received during scanning and the received determined value of the physical property, modifying a performance parameter of the pulsed light beam during scanning across the wafer.Type: ApplicationFiled: June 4, 2014Publication date: March 12, 2015Inventors: Ivan Lalovic, Omar Zurita, Gregory Allen Rechtsteiner, Paolo Alagna, Simon Hsieh, Jason J. Lee, Rostislav Rokitski, Rui Jiang