Patents by Inventor Omez S. Mesina

Omez S. Mesina has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for controlling the output of a gas discharge laser system
    Patent number: 7277464
    Abstract: The present invention relates to a fluorine gas discharge laser system and control of replenishment of fluorine gas as the gas discharge laser operates and consumes fluorine.
    Type: Grant
    Filed: January 13, 2005
    Date of Patent: October 2, 2007
    Assignee: Cymer, Inc.
    Inventors: John A. Rule, Paolo Zambon, Tom A. Watson, Omez S. Mesina, Weijie Zheng