Patents by Inventor Ond{hacek over (r)}ej R. Ba{hacek over (c)}o

Ond{hacek over (r)}ej R. Ba{hacek over (c)}o has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Beam trajectory via combination of image shift and hardware alpha tilt
    Patent number: 11574794
    Abstract: Methods include holding a sample with a movement stage configured to rotate the sample about a rotation axis, directing an imaging beam to a first sample location with the sample at a first rotational position about the rotation axis and detecting a first transmitted imaging beam image, rotating the sample using the movement stage about the rotation axis to a second rotational position, and directing the imaging beam to a second sample location by deflecting the imaging beam in relation to an optical axis of the imaging beam and detecting a second transmitted imaging beam image, wherein the second sample location is spaced apart from the first sample location at least at least in relation to the optical axis. Related systems and apparatus are also disclosed.
    Type: Grant
    Filed: March 23, 2021
    Date of Patent: February 7, 2023
    Assignee: FEI Company
    Inventors: Ond{hacek over (r)}ej L. Shán{hacek over (e)}l, Trond Karsten Varslot, Ond{hacek over (r)}ej R. Ba{hacek over (c)}o, Martin Schneider