Patents by Inventor Onur Tigli

Onur Tigli has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Saw devices, processes for making them, and methods of use
    Patent number: 8143681
    Abstract: The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 ?m 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three post-processing steps are fully compatible with any CMOS technology. This allows any signal control/processing circuitry to be easily integrated on the same chip. ZnO is used as the piezoelectric material for the SAW generation. A thorough characterization and patterning optimization of the sputtered ZnO was carried out. The major novelties that are introduced in the SAW delay line features are: The embedded heater elements for temperature control, compensation and acoustic absorbers that are designed to eliminate edge reflections and minimize triple transit interference. Both of these attributes are designed by using the CMOS layers without disturbing the SAW performance.
    Type: Grant
    Filed: April 20, 2007
    Date of Patent: March 27, 2012
    Assignee: The George Washington University
    Inventors: Mona Zaghloul, Onur Tigli, Anis Nurashikin Nordin
  • Circular surface acoustic wave (SAW) devices, processes for making them, and methods of use
    Patent number: 8018010
    Abstract: The design, fabrication, post-processing and characterization of a novel circular design SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 ?m 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three post-processing steps are fully compatible with any CMOS technology. This allows any signal control/processing circuitry to be easily integrated on the same chip. ZnO is used as the piezoelectric material for the SAW generation. A thorough characterization and patterning optimization of the sputtered ZnO was carried out. The major novelties that are introduced in the SAW delay line features are: The embedded heater elements for temperature control, compensation and acoustic absorbers that are designed to eliminate edge reflections and minimize triple transit interference. Both of these attributes are designed by using the CMOS layers without disturbing the SAW performance.
    Type: Grant
    Filed: July 2, 2008
    Date of Patent: September 13, 2011
    Assignee: The George Washington University
    Inventors: Onur Tigli, Mona Zaghloul
  • Multiplex Biosensor
    Publication number: 20090124513
    Abstract: This invention relates to CMOS SAW-based biosensor devices for detecting analytes and biomolecules of interest.
    Type: Application
    Filed: July 2, 2008
    Publication date: May 14, 2009
    Inventors: Patricia Berg, Mona Zaghloul, Onur Tigli
  • Circular Surface Acoustic Wave (SAW) Devices, Processes for Making Them, and Methods of Use
    Publication number: 20090114798
    Abstract: The design, fabrication, post-processing and characterization of a novel circular design SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 ?m 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three post-processing steps are fully compatible with any CMOS technology. This allows any signal control/processing circuitry to be easily integrated on the same chip. ZnO is used as the piezoelectric material for the SAW generation. A thorough characterization and patterning optimization of the sputtered ZnO was carried out. The major novelties that are introduced in the SAW delay line features are: The embedded heater elements for temperature control, compensation and acoustic absorbers that are designed to eliminate edge reflections and minimize triple transit interference. Both of these attributes are designed by using the CMOS layers without disturbing the SAW performance.
    Type: Application
    Filed: July 2, 2008
    Publication date: May 7, 2009
    Inventors: Onur Tigli, Mona Zaghloul
  • SAW DEVICES, PROCESSES FOR MAKING THEM, AND METHODS OF USE
    Publication number: 20080230859
    Abstract: The design, fabrication, post-processing and characterization of a novel SAW (Surface Acoustic Wave) based bio/chemical sensor in CMOS technology is introduced. The sensors are designed in AMI 1.5 ?m 2 metal, 2 poly process. A unique maskless post processing sequence is designed and completed. The three post-processing steps are fully compatible with any CMOS technology. This allows any signal control/processing circuitry to be easily integrated on the same chip. ZnO is used as the piezoelectric material for the SAW generation. A thorough characterization and patterning optimization of the sputtered ZnO was carried out. The major novelties that are introduced in the SAW delay line features are: The embedded heater elements for temperature control, compensation and acoustic absorbers that are designed to eliminate edge reflections and minimize triple transit interference. Both of these attributes are designed by using the CMOS layers without disturbing the SAW performance.
    Type: Application
    Filed: April 20, 2007
    Publication date: September 25, 2008
    Inventors: MONA ZAGHLOUL, Onur Tigli