Patents by Inventor Onur TOKEL

Onur TOKEL has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • NANO-SCALE LITHOGRAPHY METHOD
    Publication number: 20230369052
    Abstract: The present invention relates to a method (100) which enables to fabricate one-dimensionally (linear) and two-dimensionally (planar)-confined micro/nano-structures at a desired position and depth inside a silicon chip, as embedded (buried) inside the chip and without damaging the chip surface, by means of spatially-structured laser beams.
    Type: Application
    Filed: June 14, 2022
    Publication date: November 16, 2023
    Applicant: BILKENT UNIVERSITESI (UNAM) ULUSAL NANOTEKNOLOJI ARASTIRMA MERKEZI
    Inventors: Onur TOKEL, Rana Asgari SABET, Aqiq ISHRAQ