Patents by Inventor Orii Takehiko

Orii Takehiko has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate processing apparatus and substrate processing method
    Publication number: 20040253833
    Abstract: A substrate processing apparatus and a substrate processing method are provided wherein an oxide film which is thinner than the conventional films can be formed with uniform thickness when forming an oxide film on the front-side surface of a substrate.
    Type: Application
    Filed: March 3, 2004
    Publication date: December 16, 2004
    Inventors: Orii Takehiko, Masaru Amai