Abstract: In an aspect, disclosed herein are a methods, systems and apparatus for modifying a component surface comprising, contacting the surface, with an laser beam, the surface comprising a semiconductor tool manufacturing component; modifying the surface responsive to the contacting, wherein the modifying the surface comprises forming, by micro-machining, etching, ablating, ionizing, anodizing, oxidizing, texturing, or roughening, or a combination thereof, a functional feature in the surface.

Abstract: An inspection fixture includes a seat to support a workpiece, a backpressure sensor and a focal plane array. The backpressure sensor is coupled to seat to acquire backpressure of a fluid traversing one of a first flow aperture and a second flow aperture defined in the workpiece supported on the seat of the inspection fixture. The optical focal plane array is also coupled to the seat to acquire optical image data of a portion of the workpiece including one or more of the first flow aperture and the second flow aperture defined in the workpiece supported on the seat of the inspection fixture. Inspection systems, inspection methods, and computer program products for inspecting workpieces are also described.

Abstract: A method of removing atomic layer deposition (ALD) coatings from a metallic component containing titanium is provided. Systems for facilitating processes to remove inadvertent residue ALD coating on the metallic component are further disclosed. Pre-treating the metallic component containing the residue coating provide more surface area for chemical undercutting. Further, immersing the metallic component in a cleaning chemical solution and agitating the cleaning chemical solution expedites reaction between the cleaning chemical solution and the coating to remove the residue coating without etching the metallic core of the metallic component.

Abstract: Protected metallic components and reaction chambers including protected metallic components are disclosed. Exemplary methods for forming and utilizing protected metallic components are also disclosed. Protected metallic components include a conformal protective layer disposed over a non-planar surface of a metallic core.

Abstract: Methods and apparatuses for texturizing the interior surfaces of a workpiece are described. By harnessing abrasive material contained within the workpiece, coatings that may have accumulated over time can be removed, and the original texture of the interior surfaces may be restored. One or more external energy sources such as vibratory, acoustical, or electrical energy may be used to mobilize the abrasive material and abrade the interior surfaces. The abrasive material may take the form of either abrasive dry grit or an abrasive aqueous slurry.

Abstract: A reaction chamber component for use in a deposition apparatus for depositing a layer of a first material on a substrate is provided. The component may have a base material being partially coated with a liner of the first material. The component may have a protective layer of a second material different than the first material on top of the liner of the first material to protect the component. This may be useful during a removal process for removing a parasitic coating of the same first material deposited during use of the reaction chamber component.