Patents by Inventor Osama O. Awadelkarim

Osama O. Awadelkarim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus testing IC chips for damage during fabrication
    Patent number: 5994911
    Abstract: An approach using two terminal current measurements, preferably in a cyclic current-voltage sweeping procedure, and specialized test structure, is shown to be very useful in detecting processing induced changes in poly-Si/ultra-thin SiO.sub.2 /substrate Si structures. The charging current structure discernible in this approach is seen to have different features depending on processing history of the device. This is shown for the specific case of plasma gate definition etching with or without annealing.
    Type: Grant
    Filed: April 24, 1997
    Date of Patent: November 30, 1999
    Assignee: The Penn State Research Foundation
    Inventors: Stephen J. Fonash, Osama O. Awadelkarim, Murat Okandan, Maria M. Ozaita-Mintegui