Patents by Inventor Osamu Fukada

Osamu Fukada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6158679
    Abstract: An orifice for a pressure-type flow rate controller, which can be produced by a simple method at a low cost, that provides a linearity--between the pressure P1 on the upstream side of the orifice and the flow rate--over a wide range of the pressure ratio P2/P1 of the pressure P2 on the downstream side of the orifice to the upstream pressure P1 and that permits adjustment with ease of flow characteristics among a plurality of orifices. The orifice comprises an inlet taper 1 in the shape of a bugle and a short narrowed straight section 2 adjoining the inlet taper 1, both formed by cutting one opening end of a preliminary hole 6 made in an orifice plate D, and further comprises a short inner taper 3 and an enlarged straight section 4 connecting with the taper 3 which are formed by enlarging the preliminary hole 6 at the other opening end, the short inner taper 3 adjoining the narrowed straight section 2 on one side and neighboring the enlarged straight section 4 on the other side.
    Type: Grant
    Filed: June 16, 1999
    Date of Patent: December 12, 2000
    Assignees: Fujikin Incorporated, Tokyo Electron Ltd., Tadahiro Ohmi
    Inventors: Tadahiro Ohmi, Tetu Kagazume, Kazuhiko Sugiyama, Osamu Fukada, Susumu Ozawa, Yoshihiro Satou, Ryousuke Dohi, Tomio Uno, Kouji Nishino, Hiroyuki Fukuda, Nobukazu Ikeda, Michio Yamaji