Abstract: There is provided a soft X-ray shielding structure of a soft X-ray irradiation static eliminating apparatus which irradiates air to be supplied with soft X-rays and ionizes the same, the soft X-ray shielding structure allowing the passing of the ionized air and shielding the soft X-rays and including: an accommodation body having a mesh-like inflow opening and a mesh-like outflow opening and made of a soft X-ray shielding material; and a plurality of massive members filled in the accommodation body and made of a substance shielding electromagnetic waves.

Abstract: A fan/filter unit includes a casing having formed an air outlet port on a front side thereof and an air inlet port on a rear side thereof; a fan housed in the casing so as to face the air inlet port; a filter housed in the casing so as to face the air outlet port such that the air discharged by the fan in a widthwise direction of the casing is blown forward through the filter. The fan/filter unit has a shielding plate disposed between the fan and the filter as seen in a depthwise direction of the casing so that the shielding plate shields an associated flow of air flowing in a direction from the filter to the fan.