Patents by Inventor Osamu Horiguchi

Osamu Horiguchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scheduling method and program for a substrate processing apparatus
    Patent number: 6889105
    Abstract: A method of preparing a schedule for a substrate processing apparatus. A plurality of lots are processed by the substrate processing apparatus including a plurality of processing sections for processing substrates. An order of processing the lots is determined based on a recipe including a plurality of processing steps for successively processing the lots in the processing sections.
    Type: Grant
    Filed: May 7, 2002
    Date of Patent: May 3, 2005
    Assignee: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Nobuhiro Mukuta, Jun Kawai, Kiyoshi Akao, Osamu Horiguchi
  • Scheduling method and program for a substrate processing apparatus
    Publication number: 20020173868
    Abstract: A method of preparing a schedule for a substrate processing apparatus. A plurality of lots are processed by the substrate processing apparatus including a plurality of processing sections for processing substrates. An order of processing the lots is determined based on a recipe including a plurality of processing steps for successively processing the lots in the processing sections.
    Type: Application
    Filed: May 7, 2002
    Publication date: November 21, 2002
    Applicant: Dainippon Screen Mfg. Co., Ltd.
    Inventors: Nobuhiro Mukuta, Jun Kawai, Kiyoshi Akao, Osamu Horiguchi