Abstract: Some of electromagnetic waves being emitted from an emission unit (110) and being reflected by a movable reflection unit (120) are reflected or scattered by a target object such as an object existing outside a sensor device (10). Some other of the electromagnetic waves being emitted by the emission unit (110) and being reflected by the movable reflection unit (120) are reflected or scattered by a structure (200) positioned closer to the movable reflection unit (120) than the target object is. A detection unit (122) detects deflection angles of the movable reflection unit (120) in a first direction (X) and a second direction (Y). An amendment unit (150) amends a detection result by the detection unit (122), based on a receiving result of the electromagnetic waves by a receiving unit (130), the electromagnetic waves being reflected or scattered by the structure (200).

Abstract: A portion of electromagnetic waves emitted from an emitting unit (110) and reflected by a movable reflection unit (120) is reflected or scattered by a target object such as an object present outside a sensor device (10). Another portion of electromagnetic waves emitted from the emitting unit (110) and reflected by the movable reflection unit (120) is reflected or scattered by a structure (200) positioned closer to the movable reflection unit (120) than the target object. A control unit (150) controls an amplitude of oscillation of the movable reflection unit (120), based on a receiving result from a receiving unit (130) for the electromagnetic waves reflected or scattered by the structure (200). Further, the control unit (150) controls the interval of the emitting timing of the electromagnetic waves from the emitting unit (110), based on the receiving result from the receiving unit (130) for the electromagnetic waves reflected or scattered by the structure (200).

Abstract: A signal generating unit of a formatter inputs a misalignment amount ? unique to an individual recording apparatus and record data into a record signal compensation unit, and in accordance with these the record signal compensation unit generates a compensated beam deflection signal and substrate velocity signal to a beam unit and rotation and movement drive unit. With this arrangement, it is possible to perform compensation which matches errors in individual unit, in response to the errors (mechanical errors) in assembly dimension precision of parts and control precision of control devices which can vary among individual unit of the recording apparatus.

Abstract: A mold is provided, at an outer circumferential region thereof, with portions to be gripped, to allow a transfer apparatus to perform transferring to an object. The portions to be gripped are formed in a different shape from the remaining portion of the outer circumferential region. For a mold set including two molds, each of the molds is provided, at an outer circumferential region thereof, with portions to be gripped, to allow the transfer apparatus to perform transferring to the object. The portions to be gripped are formed in a different shape from the remaining portion of the outer circumferential region. The portions to be gripped of one of the molds and the portions to be gripped of the other mold are disposed at different angular positions.

Abstract: Blanking by a blanking control unit is eliminated by making the tangential direction movement velocity of the substrate and the deflection velocity of the beam faster in the segment, in which the recording pattern is sparse, and making and slower in segments, in which it is dense. In this case, in segment in which it is desired to form a recording pattern thicker in the radial direction, a thick recording can be realized by setting the recording velocity by the recording velocity setting means to be slower, and in the case where is substantially constant, setting to be relatively slower, than in the segments.

Abstract: A mold is provided, at an outer circumferential region thereof, with portions to be gripped, to allow a transfer apparatus to perform transferring to an object. The portions to be gripped are formed in a different shape from the remaining portion of the outer circumferential region. For a mold set including two molds, each of the molds is provided, at an outer circumferential region thereof, with portions to be gripped, to allow the transfer apparatus to perform transferring to the object. The portions to be gripped are formed in a different shape from the remaining portion of the outer circumferential region. The portions to be gripped of one of the molds and the portions to be gripped of the other mold are disposed at different angular positions.

Abstract: An object is to transfer a concavo-convex pattern formed on the surface of a transfer die onto a transfer target accurately. A pattern transfer apparatus according to the present invention is one for putting a transfer die having a concavo-convex pattern against a transfer target on a substrate to transfer the concavo-convex pattern onto a surface of the transfer target. It is characterized by comprising pressing means for pressing the transfer die against the transfer target on the substrate at a plurality of different locations independently.

Abstract: An imprinting mold having a recess/protrusion surface. The recess/protrusion surface is made up of a plurality of regions different in the ratio of the area of recesses to the area of protrusions, and a recess/protrusion surface of a region where the recess area percentage is relatively small is formed deeper in recess/protrusion depth than a recess/protrusion surface of a region where the recess area percentage is relatively large.

Abstract: A recording device including a beam deflection section for relatively moving an irradiation position of an exposure beam with respect to a substrate on which a resist layer is formed; a substrate velocity adjustment section for adjusting a moving velocity of the substrate based on a deflection amount of the exposure beam; and a deflection control section for controlling to change a deflection velocity of the exposure beam during exposure of the recording signals according to the moving velocity of the substrate.

Abstract: A transfer mold for manufacturing a recording medium by imprinting, having a transfer surface on which a data area having a data track pattern for a disk-shaped recording medium and a dummy area having a dummy pattern in an outward portion and/or an inward portion of the data area are formed. The dummy pattern includes at least one line of a plurality of dummy protrusions that have a width in a disk radial direction of no less than a track pitch of the data track pattern.

Abstract: Blanking by a blanking control unit is eliminated by making the tangential direction movement velocity of the substrate and the deflection velocity of the beam faster in the segment, in which the recording pattern is sparse, and making and slower in segments, in which it is dense. In this case, in segment in which it is desired to form a recording pattern thicker in the radial direction, a thick recording can be realized by setting the recording velocity by the recording velocity setting means to be slower, and in the case where is substantially constant, setting to be relatively slower, than in the segments.

Abstract: A signal generating unit of a formatter inputs a misalignment amount ? unique to an individual recording apparatus and record data into a record signal compensation unit, and in accordance with these the record signal compensation unit generates a compensated beam deflection signal and substrate velocity signal to a beam unit and rotation and movement drive unit. With this arrangement, it is possible to perform compensation which matches errors in individual unit, in response to the errors (mechanical errors) in assembly dimension precision of parts and control precision of control devices which can vary among individual unit of the recording apparatus.

Abstract: A recording device including a beam deflection section for relatively moving an irradiation position of an exposure beam with respect to a substrate on which a resist layer is formed; a substrate velocity adjustment section for adjusting a moving velocity of the substrate based on a deflection amount of the exposure beam; and a deflection control section for controlling to change a deflection velocity of the exposure beam during exposure of the recording signals according to the moving velocity of the substrate.

Abstract: The device includes a substrate holding portion for holding a substrate having resist formed thereon, a driving portion for varying the irradiation position of an exposure beam relatively to the substrate, and a cooling portion for cooling the substrate during irradiation of the exposure beam.

Abstract: An object is to transfer a concavo-convex pattern formed on the surface of a transfer die onto a transfer target accurately. A pattern transfer apparatus according to the present invention is one for putting a transfer die having a concavo-convex pattern against a transfer target on a substrate to transfer the concavo-convex pattern onto a surface of the transfer target. It is characterized by comprising pressing means for pressing the transfer die against the transfer target on the substrate at a plurality of different locations independently.

Abstract: An optical disk 11 (sample) is laid on a sample moving unit 21 within a vacuum chamber 20. An electron beam radiating mechanism 30 radiates an electron beam to the optical disk 11 while moving the optical disk 11 at a constant speed. Electron detecting means 27 detects an electron from the optical disk 11. Thus, the track pitch is measured on the basis of a detected electron signal and a measured movement amount of the optical disk 11. Also, the electron beam radiating mechanism 30 is provided with a fast deflector 33 for averaging within a deflection area to measure the track pitch.

Abstract: Preceding to the reading out of the recording information of the optical disk by the pick-up, the height of the foreign material existing at the light converging position on the information reading surface is detected by the detector, and when the height of the foreign material is higher than the floating height h of the SIL, the magnetic field is generated by applying the control current corresponding to the height of the foreign material to the coil as the magnetic field generator at the timing before the foreign material is moved to the information reading position of the pick-up by the rotation of the optical disk. Then, when the magnetic field is provided to the magnetic substance fixedly holding the SIL which is floating, the movement operation to separate the SIL to the higher position than the height of the foreign material from the information reading surface together with the magnetic substance, is conducted.

Abstract: An optical disk 11 (sample) is laid on a sample moving unit 21 within a vacuum chamber 20. An electron beam radiating mechanism 30 radiates an electron beam to the optical disk 11 while moving the optical disk 11 at a constant speed. Electron detecting means 27 detects an electron from the optical disk 11. Thus, the track pitch is measured on the basis of a detected electron signal and a measured movement amount of the optical disk 11. Also, the electron beam radiating mechanism 30 is provided with a fast deflector 33 for averaging within a deflection area to measure the track pitch.

Abstract: It is an object of the present invention to provide an improved slider moving device and an improved information recording and reproducing apparatus equipped with the improved slider moving device. The improved slider moving device is so formed that a slider mounting an information reading or recording means can be moved to a predetermined position in a direction approaching an information recording medium, and can also be moved to a predetermined position in a radial direction of the information recording medium, characterized in that a first material formed on the slider's one surface facing the information recording medium is the same as or close to, in the electrification precedence, a second material formed on the information recording medium's one surface facing the slider.

Abstract: An optical pickup is provided with: a light emitting device for emitting a light beam onto a record medium comprising a transparent layer, which is transparent for the light beam and through which the light beam is transmitted; a light receiving device for receiving a reflection light of the light beam from the record medium; a liquid crystal compensating device for compensating birefringence, which is generated in the light beam when the light beam is transmitted through the transparent layer, by controlling an orientation direction of liquid crystal molecules in a liquid crystal layer so as to give a canceling phase difference to the light beam transmitted through the liquid crystal layer; a generating device for generating an indication signal indicative of the birefringence; and a controlling device for controlling the orientation direction on the basis of the indication signal so that a first angle between a standard line, which is perpendicular to an optical axis of the light beam and is set in advance,