Abstract: An optical encoder includes a scale; a light source; a plurality of light receiving element arrays (three light receiving element arrays) receiving via the scale light emitted from the light source; and a measurer. The first and the third light receiving element arrays are each divided into two areas. The measurer includes an abnormality determiner determining whether an abnormality has occurred in the areas based on signals output from the areas, and a location measurer measuring a location of the scale based on signals output from the areas (for which the abnormality determiner has determined that an abnormality has not occurred) and the second light receiving element array.

Abstract: The invention provides a highly accurate and inexpensive electromagnetic induction type encoder capable of acquiring strong signal intensity with the offset reduced by a short scale coil, and is durable against fluctuations in the yaw direction, which includes a number of scale coils 14 arrayed on a scale 10 along the measurement direction, and transmitting coils 24 and receiving coils 20 that are disposed on a grid 12 relatively movably in the measurement direction with respect to the scale, and which detects a relative movement amount of the scale and the grid from changes in magnetic fluxes detected by the receiving coils via the scale coil when the transmitting coils are magnetized, wherein a plurality of sets of the transmitting coils (24A, 24B), the receiving coils (20A, 20B) and the scale coils (14A, 14B) are disposed symmetrically with respect to the center of the scale, and scale coils of one set located at a symmetrical position around the center of the scale is disposed with ½ phase of the scale pi

Abstract: The invention provides a highly accurate and inexpensive electromagnetic induction type encoder capable of acquiring strong signal intensity with the offset reduced by a short scale coil, and is durable against fluctuations in the yaw direction, which includes a number of scale coils 14 arrayed on a scale 10 along the measurement direction, and transmitting coils 24 and receiving coils 20 that are disposed on a grid 12 relatively movably in the measurement direction with respect to the scale, and which detects a relative movement amount of the scale and the grid from changes in magnetic fluxes detected by the receiving coils via the scale coil when the transmitting coils are magnetized, wherein a plurality of sets of the transmitting coils (24A, 24B), the receiving coils (20A, 20B) and the scale coils (14A, 14B) are disposed symmetrically with respect to the center of the scale, and scale coils of one set located at a symmetrical position around the center of the scale is disposed with ½ phase of the scale pi

Abstract: A caliper gauge (1) includes: a temperature sensor (13) that is provided on a slider (11) and detects a temperature of a main beam (10); a temperature information storage (14) that stores the temperature of the main beam (10) detected by the temperature sensor (13) and a displacement of the slider (11) relative to the main beam (10) that an encoder (12) detects concurrently with the temperature detection as temperature information of the main beam (10); and a processing unit (16) that calculates a thermal expansion amount of the main beam (10) based on the temperature information of the main beam (10) stored in the temperature information storage (14) to compensate the displacement of the slider (11) relative to the main beam (10) detected by the encoder (12) based on the calculated thermal expansion amount.

Abstract: The invention provides an induction type displacement detector capable of achieving an improved resolution and high precision. The induction type displacement detector comprises a scale, and a sensor head movable along a measurement axis. A plurality of flux coupling windings are arranged on the scale along the measurement axis. A receiving winding is arranged on the sensor head, including receiving loops arrayed along the measurement axis.

Abstract: The invention provides an induction type displacement detector capable of achieving an improved resolution and high precision. The induction type displacement detector comprises a scale, and a sensor head movable along a measurement axis. A plurality of flux coupling windings are arranged on the scale along the measurement axis. A receiving winding is arranged on the sensor head, including receiving loops arrayed along the measurement axis.

Abstract: There is provided a small, high-performance electrostatic capacitance probe device and a displacement measuring circuit using the probe device. The electrostatic capacitance probe device is formed from a processed, stacked substrate with a silicon substrate/insulator/silicon substrate structure. A support substrate (1) is formed through a process of etching the first silicon substrate to remove undesired portions. A probe (2) is formed by etching the second silicon substrate and provided with a proximal electrode portion (2b) secured on the support substrate (1) by means of the insulator (11) and a beam portion (2a) separated from the support substrate (1) by removing the insulator (11) from beneath the beam portion (2a). A pair of detecting electrodes (3, 4) is formed by etching the second silicon substrate, secured on the support substrate (1) by the insulator (1) and located to sandwich a portion of the beam portion (2a) close to the proximal electrode portion (2b).

Abstract: There is provided a small, high-performance electrostatic capacitance probe device and a displacement measuring circuit using the probe device. The electrostatic capacitance probe device is formed from a processed, stacked substrate with a silicon substrate/insulator/silicon substrate structure. A support substrate (1) is formed through a process of etching the first silicon substrate to remove undesired portions. A probe (2) is formed by etching the second silicon substrate and provided with a proximal electrode portion (2b) secured on the support substrate (1) by means of the insulator (11) and a beam portion (2a) separated from the support substrate (1) by removing the insulator (11) from beneath the beam portion (2a). A pair of detecting electrodes (3, 4) is formed by etching the second silicon substrate, secured on the support substrate (1) by the insulator (1) and located to sandwich a portion of the beam portion (2a) close to the proximal electrode portion (2b).

Abstract: A capacitance-type measuring device for absolute measurement of positions is disclosed, which comprises a displacement sensor having a fixed element and a movable element, the movable element being capacitance-coupled to the fixed element and relatively movable against the fixed element, the displacement sensor being adapted to output signals corresponding to relative positions of the movable element against the fixed element, a signal processing circuit for processing the output signals of the displacement sensor and outputting an absolute measurement value corresponding to displacement of the movable element against the fixed element, a control circuit for controlling the operations of the displacement sensor and the signal processing circuit, and a power supply for supplying electric power to the displacement sensor, the signal processing circuit, and the control circuit, wherein the control circuit activates the signal processing circuit at a suitable interval so as to perform an intermittent measurement