Patents by Inventor Osamu Komiyaji
Osamu Komiyaji has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20230381948Abstract: A transfer robot includes a plurality of hands, a plurality of hand drive motors, and an arm. The plurality of hands are capable of holding a transfer target object, and pivot individually around a pivoting axis. The plurality of hand drive motors are arranged in a direction following the pivoting axis, such that a motor axis to which the plurality of hands are each connected becomes concentric with the pivoting axis, and directly drive the plurality of hands, respectively. The arm includes therein the plurality of hand drive motors.Type: ApplicationFiled: May 19, 2023Publication date: November 30, 2023Inventors: Hiroki SANEMASA, Ryosuke WATANABE, Osamu HARADA, Osamu KOMIYAJI, Masanobu KAKIHARA, Yuki HONDA
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Patent number: 11804391Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: GrantFiled: June 15, 2022Date of Patent: October 31, 2023Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Osamu Komiyaji, Hiromitsu Akae, Go Yamaguchi, Tadataka Noguchi
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Patent number: 11701785Abstract: A transport device in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction. The transport device includes a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber, and a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall. Additionally, the transport device includes a mobile buffer configured to hold the substrate and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position. The movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.Type: GrantFiled: December 21, 2021Date of Patent: July 18, 2023Inventors: Go Yamaguchi, Hiromitsu Akae, Kensuke Oni, Osamu Komiyaji
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Publication number: 20220310423Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: ApplicationFiled: June 15, 2022Publication date: September 29, 2022Inventors: Osamu KOMIYAJI, Hiromitsu AKAE, Go YAMAGUCHI, Tadataka NOGUCHI
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Patent number: 11417550Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: GrantFiled: December 10, 2020Date of Patent: August 16, 2022Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Osamu Komiyaji, Hiromitsu Akae, Go Yamaguchi, Tadataka Noguchi
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Publication number: 20220111539Abstract: The transport device provided in a transport chamber having a reduced pressure atmosphere and including a sidewall extending along an arrangement direction, the transport device comprising: a first robot fixed at a first robot position in the transport chamber and configured to transfer a substrate to and from a first chamber provided outside the transport chamber; a second robot fixed at a second robot position in the transport chamber and configured to transfer the substrate to and from a second chamber provided outside the transport chamber on the sidewall; and a mobile buffer configured to: hold the substrate; and move along a movement locus extending along the arrangement direction and located between the sidewall and each of the first robot position and the second robot position, wherein the movement locus includes a first position for transferring the substrate to and from the first robot and a second position for transferring the substrate to and from the second robot.Type: ApplicationFiled: December 21, 2021Publication date: April 14, 2022Inventors: Go YAMAGUCHI, Hiromitsu AKAE, Kensuke ONI, Osamu KOMIYAJI
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Publication number: 20210242052Abstract: A transfer system includes: a transfer chamber having a side wall provided thereon with a plurality of processing chambers in which a processing is performed on a substrate under a decompressed atmosphere, and configured such that the substrate is transferred in the decompressed atmosphere; a plurality of robots fixed in the transfer chamber and configured to transfer the substrate; and a movable buffer configured to hold the substrate and move in a horizontal direction along the side wall between the side wall and the robots in the transfer chamber. The robots exchange the substrate between the movable buffer and the processing chambers in cooperation with a movement of the movable buffer.Type: ApplicationFiled: December 10, 2020Publication date: August 5, 2021Inventors: Osamu KOMIYAJI, Hiromitsu AKAE, Go YAMAGUCHI, Tadataka NOGUCHI
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Patent number: 10658216Abstract: A transfer system includes a transfer chamber having transfer positions, a first robot provided in the transfer chamber to transfer articles between the transfer positions, a second robot provided in the transfer chamber to transfer articles between the transfer positions, and a retreat unit configured to move one robot among the first robot and the second robot to a retreat position by changing a height of the one robot such that the one robot does not interfere with an operating range of another robot among the first robot and the second robot.Type: GrantFiled: June 25, 2019Date of Patent: May 19, 2020Assignee: KABUSHIKI KAISHA YASKAWA DENKIInventors: Osamu Komiyaji, Hiroki Sanemasa
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Publication number: 20200051846Abstract: A transfer system includes a transfer chamber having transfer positions, a first robot provided in the transfer chamber to transfer articles between the transfer positions, a second robot provided in the transfer chamber to transfer articles between the transfer positions, and a retreat unit configured to move one robot among the first robot and the second robot to a retreat position by changing a height of the one robot such that the one robot does not interfere with an operating range of another robot among the first robot and the second robot.Type: ApplicationFiled: June 25, 2019Publication date: February 13, 2020Applicant: KABUSHIKI KAISHA YASKAWA DENKIInventors: Osamu KOMIYAJI, Hiroki SANEMASA
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Patent number: 9028197Abstract: A robot includes an arm having a base end portion rotatably installed through a joint part and a tip end portion in which an output shaft is installed; and a drive mechanism arranged within the arm and configured to drive the output shaft at a reduced speed. The drive mechanism includes a motor having a motor shaft, a driving pulley attached to the motor shaft, a driven pulley attached to the output shaft, at least one intermediate pulley provided between the driving pulley and the driven pulley, and a plurality of belts for operatively interconnecting the driving pulley and the driven pulley through the intermediate pulley.Type: GrantFiled: January 11, 2013Date of Patent: May 12, 2015Assignee: Kabushiki Kaisha Yaskawa DenkiInventors: Masatoshi Furuichi, Osamu Komiyaji, Masayuki Suzuki, Hiroki Sanemasa
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Publication number: 20040179932Abstract: A robot constructed according to the present disclosure is adapted to grasp and move a plurality of wafers simultaneously. Such robot includes movable arm and wrist rotatably mounted thereto, with a multi-wafer robotic hand coupled to the wrist of the robot. Wafers can be transferred by inserting end effectors between the wafers in a receptacle, grasping the desired wafers, relocating the hand to another wafer receptacle, and releasing of the wafers into the second receptacle.Type: ApplicationFiled: March 31, 2004Publication date: September 16, 2004Inventors: Jaswant Sandhu, Toshi Kono, Osamu Komiyaji, Robert Hosack, Keith Berdogin, Neal Martin
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Publication number: 20040013503Abstract: A robot constructed according to the present disclosure is adapted to grasp and move a plurality of wafers simultaneously. Such robot includes movable arm and wrist rotatably mounted thereto, with a multi-wafer robotic hand coupled to the wrist of the robot. Wafers can be transferred by inserting end effectors between the wafers in a receptacle, grasping the desired wafers, relocating the hand to another wafer receptacle, and releasing of the wafers into the second receptacle.Type: ApplicationFiled: July 22, 2002Publication date: January 22, 2004Inventors: Jaswant Sandhu, Toshi Kono, Osamu Komiyaji, Robert Hosack, Keith Berdogin, Neal Martin