Abstract: The purpose of the present invention is to allow a clean airflow around a substrate to reliably move downward of the substrate in an examination device in which clean air is supplied to an inspection chamber. This examination device is provided with a rectifying plate (see FIG. 4A) which covers a part of the upper surface of a stage for mounting a substrate, and is disposed between a gas supply unit and the stage to block an airflow toward the substrate.

Abstract: A weight of a movable body is reduced by using two guides, smooth movement of the movable body is ensured, a decrease in life of the guides is prevented, and a workload during installation of the guides is reduced. A workpiece conveyor that conveys a workpiece includes chucks that hold a workpiece, and a movable body that supports the chucks and is movable in an X direction along first and second guides, which are disposed in parallel or substantially parallel spaced apart from each other, and the movable body includes a first structure guided by the first guide, a second structure guided by the second guide, and a joint that is provided between the first structure and the second structure, and allows one of the first structure and the second structure to swing with respect to the other about an axis of a swing shaft set parallel or substantially parallel to the X direction.

Abstract: A weight of a movable body is reduced by using two guides, smooth movement of the movable body is ensured, a decrease in life of the guides is prevented, and a workload during installation of the guides is reduced. A workpiece conveyor that conveys a workpiece includes chucks that hold a workpiece, and a movable body that supports the chucks and is movable in an X direction along first and second guides, which are disposed in parallel or substantially parallel spaced apart from each other, and the movable body includes a first structure guided by the first guide, a second structure guided by the second guide, and a joint that is provided between the first structure and the second structure, and allows one of the first structure and the second structure to swing with respect to the other about an axis of a swing shaft set parallel or substantially parallel to the X direction.

Abstract: A failure diagnosis apparatus for an exhaust gas recirculation system eliminates the influence of various disturbance factors that vary the suction air pressure, diagnoses a failure of the exhaust gas recirculation system on the basis of the suction air pressure, and prevents incorrect diagnosis. The system includes a fresh air pressure unit for determining an estimated fresh air pressure inside a suction pipe from the operating condition of an internal combustion engine and an actual exhaust gas recirculation pressure estimating unit for determining an EGR gas pressure on the basis of a measured suction pipe pressure detected by a suction pipe pressure detecting unit and estimated fresh air pressure. A failure is judged on the basis of the estimated EGR gas pressure and the detected operating condition.

Abstract: To provide a failure diagnosis apparatus for an exhaust gas recirculation system which is capable of eliminating the influence of various disturbance factors that vary the suction air pressure, diagnosing a failure of the exhaust gas recirculation system on the basis of the suction air pressure, and preventing wrong diagnosis. A failure diagnosis apparatus for an exhaust gas recirculation system consists of a fresh air pressure estimating means 2911 for calculating an estimated fresh air pressure inside a suction pipe from the operating condition of an internal combustion engine, an actual EGR (exhaust gas recirculation) gas pressure estimating means 2914 for estimating an EGR gas pressure on the basis of a measured suction pipe pressure detected by a suction pipe pressure detecting means 2911 and an estimated fresh air pressure calculated above, and a failure judging means 2910 for judging the failure on the basis of the estimated EGR gas pressure and the detected operating condition.

Abstract: An engine exhaust emission control arrangement has a catalytic converter including a three-way catalyst. A first oxygen sensor detects an oxygen concentration of exhaust gas upstream of the catalyst and a second oxygen sensor detects an oxygen concentration of exhaust gas downstream of the catalyst. A microprocessor calculates a specific period oxygen storage amount of a catalyst while the upstream oxygen concentration is higher than the stoichiometric concentration and the downstream oxygen concentration is in a predetermined concentration range which has a value approximately equal to the stoichiometric oxygen concentration. The microprocessor also calculates a specific period oxygen release amount of a catalyst while the upstream oxygen concentration is lower than the stoichiometric concentration and the downstream oxygen concentration produces an indication of a predetermined concentration range.

Abstract: A controller (6) computes the oxygen storage amount of the catalyst (3) separately as a high-speed component and a low speed component in accordance with actual characteristic. A target air-fuel ratio of an engine (1) is computed so that the oxygen storage amount is a predetermined target amount, and air-fuel ratio control of the engine (1) is performed. The oxygen storage amount is computed using an storage/release rate set according to the exhaust air-fuel ratio and catalyst temperature, etc. In this way, the oxygen storage amount of the catalyst can be precisely computed regardless of the variation in the storage/release rate which accompanies a catalyst temperature variation, and the real oxygen storage amount can therefore be controlled with a higher level of precision.

Abstract: A microprocessor (6) computes an oxygen storage amount of a catalyst (3) separately for a high speed component and a low speed component in accordance with real characteristic. A target air-fuel ratio of an engine (1) is computed and air-fuel ratio control of the engine (1) it is performed so that the high speed component is constant. The deterioration of the catalyst (3) is determined by integrating the high speed component of the oxygen storage amount computed during the air-fuel ratio control process for a predetermined number of times, and comparing its average value with a determining value. The oxygen storage amount of the high speed component which is sensitive to catalyst deterioration is integrated so as to obtain a highly precise determining result to determine the deterioration.

Abstract: To provide a failure diagnosis apparatus for an exhaust gas recirculation system which is capable of eliminating the influence of various disturbance factors that vary the suction air pressure, diagnosing a failure of the exhaust gas recirculation system on the basis of the suction air pressure, and preventing wrong diagnosis. A failure diagnosis apparatus for an exhaust gas recirculation system consists of a fresh air pressure estimating means 2911 for calculating an estimated fresh air pressure inside a suction pipe from the operating condition of an internal combustion engine, an actual EGR (exhaust gas recirculation) gas pressure estimating means 2914 for estimating an EGR gas pressure on the basis of a measured suction pipe pressure detected by a suction pipe pressure detecting means 2911 and an estimated fresh air pressure calculated above, and a failure judging means 2910 for judging the failure on the basis of the estimated EGR gas pressure and the detected operating condition.

Abstract: To provide a failure diagnosis apparatus for an exhaust gas recirculation system which is capable of eliminating the influence of various disturbance factors that vary the suction air pressure, diagnosing a failure of the exhaust gas recirculation system on the basis of the suction air pressure, and preventing wrong diagnosis. A failure diagnosis apparatus for an exhaust gas recirculation system consists of a fresh air pressure estimating means 2911 for calculating an estimated fresh air pressure inside a suction pipe from the operating condition of an internal combustion engine, an actual EGR (exhaust gas recirculation) gas pressure estimating means 2914 for estimating an EGR gas pressure on the basis of a measured suction pipe pressure detected by a suction pipe pressure detecting means 2911 and an estimated fresh air pressure calculated above, and a failure judging means 2910 for judging the failure on the basis of the estimated EGR gas pressure and the detected operating condition.

Abstract: A controller (6) computes an oxygen storage amount of a catalyst (3) separately as a high speed component/amount and a low speed component/amount according to predetermined release/adsorption characteristics. A target air-fuel ratio of an engine is computed and the air-fuel ratio of the engine is controlled so that the high speed component is maintained constant. The target air-fuel ratio of the engine (1) is limited by an upper limiter and lower limiter so that the high speed component converges to the target value, an excessively large variation of the air-fuel ratio is prevented, and impairment of drivability and fuel cost-performance is also prevented. Further, after lean running due to fuel cut, etc., the lower limiter is lowered to the rich side, and the oxygen storage amount is rapidly induced to converge on the target value.

Abstract: To provide a failure diagnosis apparatus for an exhaust gas recirculation system which is capable of eliminating the influence of various disturbance factors that vary the suction air pressure, diagnosing a failure of the exhaust gas recirculation system on the basis of the suction air pressure, and preventing wrong diagnosis. A failure diagnosis apparatus for an exhaust gas recirculation system consists of a fresh air pressure estimating device 2911 for calculating an estimated fresh air pressure inside a suction pipe from the operating condition of an internal combustion engine, an actual EGR (exhaust gas recirculation) gas pressure estimating device 2914 for estimating an EGR gas pressure on the basis of a measured suction pipe pressure detected by a suction pipe pressure detecting device 2911 and an estimated fresh air pressure calculated above, and a failure judging device 2910 for judging the failure on the basis of the estimated EGR gas pressure and the detected operating condition.

Abstract: A controller (6) controls an air-fuel ratio of an engine (1) so that an oxygen storage amount of a catalyst (3) provided in an exhaust passage (2) is maintained constant. At this time, the controller (6) computes or estimates the oxygen storage amount separately for a first amount and a second amount, where the first amount is estimated based on a relationship between the first and second amount. The controller (6) controls the air/fuel ratio based on the estimated first amount.

Abstract: A catalyst 3 which has oxygen storage performance is installed in an engine exhaust passage 2, an oxygen storage amount is estimated based on the output of an upstream air-fuel ratio sensor 4 installed in the upstream of the catalyst 3, and an air-fuel ratio is controlled so that this oxygen storage amount coincides with a target value. When the output of a downstream air-fuel ratio sensor 5 has become lean or rich for longer than a fixed time, the output of the upstream air-fuel ratio sensor 4 is corrected based on the output of the downstream air-fuel ratio sensor 5 placed in the downstream of the catalyst 3. In this way, the output fluctuation due to deterioration of the air-fuel ratio sensor 4 upstream of the catalyst is corrected, and the catalyst oxygen storage amount is always precisely controlled to the target value.

Abstract: An oxygen storage amount of the catalyst (3) is estimated using a detection result from a front A/F sensor (4). An HC storage amount is calculated as a time integral of the product of the storage rate by the catalyst (3), the air-fuel ratio and the intake air amount, and a target air-fuel ratio is corrected so that a deficiency relative to a target amount of the oxygen storage amount is compensated based on this computation result.

Abstract: A controller (6) computes the oxygen storage amount of the catalyst (3) separately as a high-speed component and a low speed component in accordance with actual characteristic. A target air-fuel ratio of an engine (1) is computed so that the oxygen storage amount is a predetermined target amount, and air-fuel ratio control of the engine (1) is performed. The oxygen storage amount is computed using an storage/release rate set according to the exhaust air-fuel ratio and catalyst temperature, etc. In this way, the oxygen storage amount of the catalyst can be precisely computed regardless of the variation in the storage/release rate which accompanies a catalyst temperature variation, and the real oxygen storage amount can therefore be controlled with a higher level of precision.

Abstract: An engine exhaust emission control arrangement has a catalytic converter including a three-way catalyst. A first oxygen sensor detects an oxygen concentration of exhaust gas upstream of the catalyst and a second oxygen sensor detects an oxygen concentration of exhaust gas downstream of the catalyst. A microprocessor calculates a specific period oxygen storage amount of a catalyst while the upstream oxygen concentration is higher than the stoichiometric concentration and the downstream oxygen concentration is in a predetermined concentration range which has a value approximately equal to the stoichiometric oxygen concentration. The microprocessor also calculates a specific period oxygen release amount of a catalyst while the upstream oxygen concentration is lower than the stoichiometric concentration and the downstream oxygen concentration produces an indication of a predetermined concentration range.

Abstract: A controller (6) computes an oxygen storage amount of a catalyst (3) separately as a high speed component/amount and a low speed component/amount according to predetermined release/adsorption characteristics. A target air-fuel ratio of an engine is computed and the air-fuel ratio of the engine is controlled so that the high speed component is maintained constant. The target air-fuel ratio of the engine (1) is limited by an upper limiter and lower limiter so that the high speed component converges to the target value, an excessively large variation of the air-fuel ratio is prevented, and impairment of drivability and fuel cost-performance is also prevented. Further, after lean running due to fuel cut, etc., the lower limiter is lowered to the rich side, and the oxygen storage amount is rapidly induced to converge on the target value.

Abstract: A microprocessor (6) computes an oxygen storage amount of a catalyst (3) separately for a high speed component and a low speed component in accordance with real characteristic. A target air-fuel ratio of an engine (1) is computed and air-fuel ratio control of the engine (1) it is performed so that the high speed component is constant. The deterioration of the catalyst (3) is determined by integrating the high speed component of the oxygen storage amount computed during the air-fuel ratio control process for a predetermined number of times, and comparing its average value with a determining value. The oxygen storage amount of the high speed component which is sensitive to catalyst deterioration is integrated so as to obtain a highly precise determining result to determine the deterioration.

Abstract: An EGR system comprises a vacuum-operated EGR valve and an auxiliary valve of a diaphragm type for assisting the operation of the EGR valve. A diagnostic control unit monitors an engine rotational fluctuation parameter such as a misfire parameter under the condition of EGR and judges that there is a possibility of abnormality in the auxiliary valve when the fluctuation parameter is greater than a first judgment value. In response to this judgment, the diagnostic control unit forcibly cuts off the EGR and calculates the fluctuation parameter under the condition of EGR cutoff. The diagnostic control unit concludes that the auxiliary valve is abnormal when the fluctuation parameter in the EGR cutoff state is smaller than or equal to a second judgment value which is smaller than the first judgment value.