Patents by Inventor Osamu Monoe

Osamu Monoe has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Forced cooling apparatus for heat treatment apparatus
    Patent number: 5525057
    Abstract: A forced cooling apparatus for a heat treatment apparatus comprising a heat treatment furnace having a process tube with one end open at an furnace opening and another end closed at an furnace top portion; and a heater portion which covers the process tube, and wherein cooling of the heat treatment furnace is performed by forced cooling by flowing air into a gap formed between the heater portion and the process tube and which extends to the furnace top portion.
    Type: Grant
    Filed: August 9, 1994
    Date of Patent: June 11, 1996
    Assignee: Tokyo Electron Sagami Kabushiki Kaisha
    Inventor: Osamu Monoe
  • Heat treatment apparatus and method thereof
    Patent number: 5507639
    Abstract: Nozzles that blow an air are disposed in a space between an outer wall of a process tube and a heat generating resistor. The openings of the nozzles are oriented to the process tube corresponding to an arrangement area of semiconductor wafers. An air blowing angle and alignment of the openings of the nozzles are designated corresponding to the length of the arrangement area of the semiconductor wafers. Thus, since a portion where natural heat radiation is weak is forcedly cooled, the cooling effect can become equal in the entire region of the process tube, thereby reducing temperature drop time.
    Type: Grant
    Filed: June 28, 1994
    Date of Patent: April 16, 1996
    Assignees: Tokyo Electron Kabushiki Kaisha, Tokyo Electron Tohoku Kabushiki, Kaisha
    Inventor: Osamu Monoe
  • Forced cooling apparatus for heat treatment apparatus
    Patent number: 5360336
    Abstract: A forced cooling apparatus for a heat treatment apparatus comprising a heat treatment furnace having a process tube with one end open at an furnace opening and another end closed at an furnace top portion; and a heater portion which covers the process tube, and wherein cooling of the heat treatment furnace is performed by forced cooling by flowing air into a gap formed between the heater portion and the process tube and which extends to the furnace top portion.
    Type: Grant
    Filed: October 4, 1993
    Date of Patent: November 1, 1994
    Assignee: Tokyo Electron Sagami Kabushiki Kaisha
    Inventor: Osamu Monoe
  • Forced cooling apparatus for heat treatment apparatus
    Patent number: 5249960
    Abstract: A forced cooling apparatus for a heat treatment apparatus comprising a heat treatment furnace having a process tube with one end open at an furnace opening and another end closed at an furnace top portion; and a heater, portion which covers the process tube, and wherein cooling of the heat treatment furnace is performed by forced cooling by flowing air into a gap formed between the heater portion and the process tube and which extends to the furnace top portion.
    Type: Grant
    Filed: June 10, 1992
    Date of Patent: October 5, 1993
    Assignee: Tokyo Electron Sagami Kabushiki Kaisha
    Inventor: Osamu Monoe