Abstract: A data collecting apparatus (10) is connected to a device (20) via a network (31, 32), and includes a collector (142, 142), a communication controller (130), and a process execution controller (110). The collector (141, 142) collects data from the device (20) based on collection setting information, converts format of the data collected, and outputs the data whose format is converted. The communication controller (130) manages an addition of the collector (141, 142), provides the collection setting information to the collector (141, 142), and outputs data collected by the collector (141, 142). The process execution controller (110) manages processing of data outputted from the communication controller (130). The collector (141, 142) is provided as plug-in software (121, 122) containing information regarding a parameter setting item for when data is collected. The collection setting information is information in which a setting value is added with respect to the parameter setting item.

Abstract: A data server includes a controller, a memory that stores first information collected from devices, and master-slave management circuitry that sets whether the data server operates according to one of a master function for managing a data server and a slave function for being managed by the data server. In a case where the master function is set by the master-slave management circuitry, the controller sends to an external client, in response to receiving a data collection request from the external client, information corresponding to the data collection request that is one of data stored in the memory and data received from the other data server. In a case where the slave function is set by the master-slave management circuitry, the controller sends the first information to the other data server in which the master function is set.

Abstract: A data processing device includes: a functional-process-module storage unit to store a functional process module for data processing; a setting-information storage unit to store setting information for an execution sequence of a plurality of the functional process modules and for target input data on which the functional process module performs a functional process; and a process manager unit to cause the functional process module to perform a functional process on the target input data on a basis of a sequence set in the setting information.

Abstract: An information processing apparatus includes a data acquisition unit to acquire input data that is time-series data; a sampling error upper limit calculation unit to calculate, when similar learning subsequences selected from among a plurality of learning subsequences extracted from learning data that is time-series data are integrated to generate a sample subsequence. The information processing apparatus further includes a sampling error upper limit using data taken from the input data, the sampling error upper limit being an upper limit on dissimilarity between the learning subsequences to be integrated; and a sample subsequence generation unit to generate the sample subsequence from the learning data using the sampling error upper limit.

Abstract: An information processing device includes a data input unit that receives time-series data from an external device, a first processing unit that adds time information to data acquired from the data input unit and processes data to which the time information has been added, on a real-time operating system that performs a process within a specified time period, and a second processing unit that processes data to which the time information has been added, on a non-real-time operating system.

Abstract: A data processing device includes: a functional-process-module storage unit to store a functional process module for data processing; a setting-information storage unit to store setting information for an execution sequence of a plurality of the functional process modules and for target input data on which the functional process module performs a functional process; and a process manager unit to cause the functional process module to perform a functional process on the target input data on a basis of a sequence set in the setting information.

Abstract: A data collecting apparatus (10) is connected to a device (20) via a network (31, 32), and includes a collector (142, 142), a communication controller (130), and a process execution controller (110). The collector (141, 142) collects data from the device (20) based on collection setting information, converts format of the data collected, and outputs the data whose format is converted. The communication controller (130) manages an addition of the collector (141, 142), provides the collection setting information to the collector (141, 142), and outputs data collected by the collector (141, 142). The process execution controller (110) manages processing of data outputted from the communication controller (130). The collector (141, 142) is provided as plug-in software (121, 122) containing information regarding a parameter setting item for when data is collected. The collection setting information is information in which a setting value is added with respect to the parameter setting item.

Abstract: A data server includes a data storage section that stores first information collected from devices; a master-slave management section that sets whether the data server has a master function for managing a data server or a slave function for being managed by the data server; and a configuration management section. In a case where the master function is set by the master-slave management section, the configuration management section sends, in response to receiving a data collection request from an external client, information corresponding to the data collection request from the data storage section or the data server to the client. In a case where the slave function is set by the master-slave management section, the configuration management section sends the first information to the data server in which the master function is set.

Abstract: An information processing apparatus includes a data acquisition unit to acquire input data that is time-series data; a sampling error upper limit calculation unit to calculate, when similar learning subsequences selected from among a plurality of learning subsequences extracted from learning data that is time-series data are integrated to generate a sample subsequence. The information processing apparatus further includes a sampling error upper limit using data taken from the input data, the sampling error upper limit being an upper limit on dissimilarity between the learning subsequences to be integrated; and a sample subsequence generation unit to generate the sample subsequence from the learning data using the sampling error upper limit.

Abstract: To obtain a position detection device capable of detecting highly accurate and robust position by suppressing affect of error detection of an edge, provided is a configuration for performing a validity determination of edges detected by binarizing an image signal (21) converted by a light-receiving element (3) for receiving light irradiated from a light source (1) toward a scale (2) having a code pattern, and performing position detection after removing the edges determined to be invalid as edges that have been affected by foreign matter and the like among the edges on which the validity determination has been performed.

Abstract: To obtain a position detection device capable of detecting highly accurate and robust position by suppressing affect of error detection of an edge, provided is a configuration for performing a validity determination of edges detected by binarizing an image signal (21) converted by a light-receiving element (3) for receiving light irradiated from a light source (1) toward a scale (2) having a code pattern, and performing position detection after removing the edges determined to be invalid as edges that have been affected by foreign matter and the like among the edges on which the validity determination has been performed.

Abstract: Provided is an absolute encoder capable of detecting the absolute angle at high resolution and with high precision. An image sensor receives light in an absolute value code pattern of a scale, an edge detecting unit detects from the received light signal an edge pixel position and an edge direction, and an edge position correcting unit corrects the edge pixel position based on the edge direction. A phase detecting unit detects from the corrected edge pixel position the phase shift amount of a shift from a reference pixel position of the image sensor, and a high precision detection unit uses a rough absolute position detected by a rough detection unit and the phase shift amount detected by the phase detecting unit to detect the absolute position with high precision.

Abstract: Provided is an absolute encoder capable of detecting the absolute angle at high resolution and with high precision. An image sensor receives light in an absolute value code pattern of a scale, an edge detecting unit detects from the received light signal an edge pixel position and an edge direction, and an edge position correcting unit corrects the edge pixel position based on the edge direction. A phase detecting unit detects from the corrected edge pixel position the phase shift amount of a shift from a reference pixel position of the image sensor, and a high precision detection unit uses a rough absolute position detected by a rough detection unit and the phase shift amount detected by the phase detecting unit to detect the absolute position with high precision.

Abstract: The present invention has an object to perform specimen charge measurement or focusing at a high speed and with high precision also for a specimen in which fixed charge and induced charge may be mixedly present. As one mode to achieve the object, there are proposed a specimen potential measuring method and a device to implement the method characterized in that when specimen potential information obtained by a first specimen potential measuring device disposed outside a specimen chamber or specimen potential information beforehand obtained is equal to or more than a predetermined threshold value or is more than the threshold value, measurement of specimen potential is selectively conducted by use of a second specimen potential measuring device in the specimen chamber.

Abstract: In order that a displacement between patterns of different heights, formed on a sample in a plurality of different pattern-forming steps, can be measured at fixed throughput and with high accuracy, correspondence between parameters of lenses and beam deflector of an electron optical system and an angle of incidence of a beam upon the sample is recorded as data, then a correction value for the amount of displacement or edge positions is calculated, and a true amount of displacement is calculated from the correction value and an image under observation.

Abstract: The image update timings of a plurality of display devices are adjusted by calculating, in their image reproduction/updating control means (7), the phase difference between a synchronization adjustment signal (SAS) created from synchronization adjustment data (SAD) received from the transmitting apparatus TA by a data reception means (6) and an image display control signal (HC) output to the image display means (8), and increasing or decreasing the period of the next and subsequent image display control signals (HC) according to the phase difference, thereby reducing the phase difference. Image updating in the plurality of display devices can be synchronized to within a fixed tolerance range.

Abstract: To interpolate a frame between the current frame and a first delayed frame preceding the current frame, an image processing device generates test interpolation data for the first delayed frame from data in point-symmetric positions in the current frame and in a second delayed frame preceding the first delayed frame. Motion vectors pointing from the first delayed frame to the current frame are found by evaluating different test interpolation data against the actual data of the first delayed frame. These motion vectors are converted to pairs of motion vectors pointing from the first delayed frame and the current frame to the interpolated frame, and these pairs of motion vectors are used to detect occlusion and generate accurate data for the interpolated frame from the data of the first delayed frame and the current frame, excluding occluded data.

Abstract: An object of the present invention is to provide a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential on the sample induced by the charged particle beam application, or detecting a compensation value for a change in a condition for the apparatus caused by the sample being electrically charged. In order to achieve the above object, the present invention provides a method and apparatus for applying a voltage to a sample so that a charged particle beam does not reach the sample (hereinafter, this may be referred to as “mirror state”) in a state in which the charged particle beam is applied toward the sample, and detecting information relating to a potential on the sample using signals obtained by that voltage application.