Patents by Inventor OSAMU NISHIKATA

OSAMU NISHIKATA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20190055651
    Abstract: [Problem] To make an in-plane variation of a plasma density uniform. [Solution] A shower head according to an embodiment of the present technology includes a head body and a shower plate. The head body has an inner space. The shower plate includes a plurality of gas injecting ports communicated with the inner space, a gas injecting surface on which gas is injected from the plurality of gas injecting ports, and a plurality of hole portions disposed on the gas injecting surface. The shower plate is configured in such a manner that surface areas of the plurality of hole portions are radially gradually increased from a center of the gas injecting surface.
    Type: Application
    Filed: September 15, 2017
    Publication date: February 21, 2019
    Inventors: YOSUKE JINBO, YOSHIAKI YAMAMOTO, HIRONORI CHATANI, OSAMU NISHIKATA, TORU KIKUCHI