Abstract: A plasma processing apparatus comprising: a processing chamber; an electromagnetic wave generator; a resonating structure formed by arranging resonators that are capable of resonating with a magnetic field component of electromagnetic waves; a measurement part configured to measure, for each frequency, a power of the electromagnetic waves traveling from the electromagnetic wave generator to the resonating structure and a power of transmitted waves, reflected waves, or scattered waves of the electromagnetic waves in the resonating structure; and a controller that performs measuring the power of the electromagnetic waves and the power of the transmitted waves, the reflected waves, or the scattered waves with the measurement part, and calculating a resonance frequency of the resonating structure based on frequency distribution of characteristic values of the resonating structure, calculated from the power of the electromagnetic waves and the power of the transmitted waves, the reflected waves, or the scattered w

Abstract: A compression apparatus according to an aspect of the present disclosure includes: a compressor that generates compressed hydrogen at a cathode by an electrolysis of water or by oxidation and reduction of hydrogen generated by applying a voltage between an anode and the cathode having flexural rigidity lower than flexural rigidity of the anode; and a controller that, in startup or in shutdown, determines an abnormality based on a gas flow rate at an exit of the anode or a pressure at the cathode after supplying a testing gas from a testing gas supplier to the cathode.

Abstract: An electrochemical hydrogen pump includes at least one hydrogen pump unit including an electrolyte membrane, an anode on one main surface of the electrolyte membrane, a cathode on the other main surface of the electrolyte membrane, an anode separator on the anode, and a cathode separator on the cathode, the at least one hydrogen pump unit transferring, to the cathode, hydrogen supplied to the anode and pressurizing the hydrogen, a first fixing member for preventing movement of the cathode separator in a direction in which the cathode separator is stacked, a first end plate on the anode separator at one end in the stacking direction, a second end plate on the cathode separator at the other end in the stacking direction, and a first gas flow channel through which hydrogen in the cathode is supplied to a first space between the second end plate and the cathode separator.

Abstract: A hydrogen system includes a compressor that includes an electrolyte membrane, an anode on a first primary surface of the electrolyte membrane, a cathode on a second primary surface of the electrolyte membrane, and a voltage applicator that applies a voltage between the anode and the cathode, the compressor producing compressed hydrogen by causing the voltage applicator to apply a voltage between the anode and the cathode to move hydrogen in hydrogen-containing-gas containing steam supplied to the anode to the cathode via the electrolyte membrane; a supply path through which the hydrogen-containing-gas containing steam to be supplied to the anode flows; a cooling mechanism disposed in the supply path; and a heat exchanger disposed in the supply path, the heat exchanger exchanging heat between the hydrogen-containing-gas flowing through the supply path upstream of the cooling mechanism and the hydrogen-containing-gas flowing through the supply path downstream of the cooling mechanism.

Abstract: A plasma processing apparatus comprises a processing chamber having a processing space, an electromagnetic wave generator configured to generate electromagnetic waves for plasma excitation to be supplied to the processing space, a dielectric having a first surface facing the processing space, an electromagnetic wave supply configured to supply the electromagnetic waves to the processing space via the dielectric, and a resonator array structure disposed along the first surface of the dielectric in the processing chamber. The resonator array structure includes a plurality of resonators resonating with magnetic field components of the electromagnetic waves, having a size smaller than a wavelength of the electromagnetic waves, and arranged in a direction along the first surface of the dielectric. The electromagnetic wave supply is configured to supply magnetic field components perpendicular to a plane on which the plurality of resonators are arranged.

Abstract: A compressor includes a stack of electrochemical cells each including an anode, a cathode, and an electrolyte membrane sandwiched therebetween, an end plate at an end in a stacking direction of the stack, and a voltage applicator that applies a voltage between the anode and the cathode, wherein, the compressor causes, by using the voltage applicator to apply the voltage, hydrogen in a hydrogen-containing gas fed to the anode to move to the cathode and produces compressed hydrogen, the end plate has a first channel through which a heating medium flows, the stack has a second channel extending therethrough and connected to the first channel, the first channel has a smaller cross-sectional area than the second channel and includes an annular channel and a transverse passage extending across the annular channel, and an external channel disposed outside the stack and through which the heating medium flows is connected to the transverse passage.

Abstract: A compression apparatus includes at least one compression unit, an anode end plate provided on an anode separator, a cathode end plate provided on a cathode separator, and a plate-like member. The compression apparatus causes, by using the voltage applier to apply a voltage, protons taken out from an anode fluid that is supplied to the anode to move to the cathode via the electrolyte membrane and generates compressed hydrogen. The plate-like member is provided with a recess in which to store the compressed hydrogen and a groove portion that surrounds an outer periphery of the recess. The groove portion is provided with a seal material and a ring material that is adjacent to an outer edge of the seal material and that surrounds the seal material. An outer peripheral surface of the groove portion and an outer peripheral surface of the ring material are both provided with gradients so as to become wider toward an opening of the groove portion.

Abstract: The compression apparatus includes an electrolyte membrane, an anode on a principal surface of the electrolyte membrane, a cathode on another principal surface of the electrolyte membrane, an anode separator on the anode, a cathode separator on the cathode, and a voltage applicator. Upon the voltage applicator applying the voltage between the anode and the cathode, protons are extracted from an anode fluid fed onto the anode to migrate onto the cathode through the electrolyte membrane and compressed hydrogen is produced. The cathode separator has a first manifold hole and a first O-ring groove surrounding the first manifold hole. The compression apparatus includes a first O-ring held by the first O-ring groove and a face seal disposed on an outer periphery of a region of an anode-side principal surface of the anode separator which faces the anode. The first O-ring is arranged to abut against the anode-side principal surface.

Abstract: A compression apparatus includes a stack of electrochemical cells each including an anode, a cathode, and an electrolyte membrane interposed therebetween, a pair of insulating plates disposed at respective ends of the stack in a stacking direction, a pair of end plates disposed on outside surfaces of the respective insulating plates, and a voltage applicator that applies a voltage between the anode and the cathode. The end plate having the cathode gas channel includes a first region that includes an outer peripheral surface of the cathode gas channel and is composed of a first steel material and a second region other than the first region which is composed of a second steel material. The first steel material has higher hydrogen embrittlement resistance than the second steel material, and the second steel material has higher stiffness than the first steel material.

Abstract: A compression device includes: an electrochemical cell that includes an anode and a cathode that sandwich an electrolyte membrane; a voltage application unit that applies a voltage between the anode and the cathode; and a metal plate that is exposed to compressed hydrogen generated at the cathode and that is resistant to hydrogen embrittlement. The metal plate includes a first terminal connected to the voltage application unit. The first terminal is directly connected to a second terminal that has a lower resistance than the first terminal. The second terminal is directly connected to the voltage application unit, and the first terminal is connected to the voltage application unit via the second terminal.

Abstract: A compression apparatus includes an electrolyte membrane, an anode disposed on a principal surface of the electrolyte membrane, a cathode disposed on another principal surface of the electrolyte membrane, and a voltage applicator that applies a voltage between the anode and the cathode. Upon the voltage applicator applying a voltage between the anode and the cathode, the compression apparatus causes protons extracted from an anode fluid fed to the anode to move to the cathode through the electrolyte membrane and produces compressed hydrogen. The compression apparatus includes a face seal disposed on an outer periphery of the anode and an elastic material interposed between the anode and the face seal.

Abstract: A compression apparatus includes a stack of electrochemical cells each including an anode, a cathode, and an electrolyte membrane interposed therebetween, a pair of insulating plates disposed at respective ends of the stack in a stacking direction, a pair of first end plates disposed on outside surfaces of the respective insulating plates, and a voltage applicator that applies a voltage between the anode and the cathode. Upon the voltage applicator applying the voltage, the compression apparatus causes hydrogen included in a hydrogen-containing gas fed to the anode to move to the cathode and produces compressed hydrogen. One of the first end plates have a first channel formed therein, through which the hydrogen-containing gas fed to the anode flows, and a second channel formed therein, through which a heating medium flows. The compression apparatus further includes a heater that heats the heating medium.

Abstract: An electrochemical hydrogen pump includes at least one hydrogen pump unit including an electrolyte membrane, an anode on one main surface of the electrolyte membrane, a cathode on the other main surface of the electrolyte membrane, an anode separator on the anode, and a cathode separator on the cathode, the at least one hydrogen pump unit transferring, to the cathode, hydrogen supplied to the anode and pressurizing the hydrogen, a first fixing member for preventing movement of the cathode separator in a direction in which the cathode separator is stacked, a first end plate on the anode separator at one end in the stacking direction, a second end plate on the cathode separator at the other end in the stacking direction, and a first gas flow channel through which hydrogen in the cathode is supplied to a first space between the second end plate and the cathode separator.

Abstract: A plasma processing apparatus includes a processing container, an electromagnetic wave generator, and a resonator array structure. The processing container provides a processing space. The electromagnetic wave generator generates an electromagnetic wave for plasma excitation that is supplied to the processing space. The resonator array structure is formed by arranging resonators configured to resonate with a magnetic field component of the electromagnetic wave, each of the resonators having a size smaller than a wavelength of the electromagnetic wave, and is positioned in the processing container.

Abstract: A compression apparatus includes an electrolyte membrane, an anode on a principal surface of the electrolyte membrane, a cathode on another principal surface of the electrolyte membrane, an anode separator on the anode, a cathode separator on the cathode, and a voltage applicator. Upon the voltage applicator applying a voltage, protons are extracted from an anode fluid fed to the anode to move to the cathode through the electrolyte membrane and compressed hydrogen is produced. The anode separator has a fluid channel, a manifold hole, and a communicating path which are formed in an anode-side principal surface. The compression apparatus includes a face seal disposed on an outer periphery of a region of the anode-side principal surface of the anode separator which faces the anode. The face seal has a three-layer structure including a metal sheet and a pair of elastic sheets.

Abstract: An electrochemical hydrogen pump includes at least one hydrogen pump unit including an electrolyte membrane, an anode on one main surface of the electrolyte membrane, a cathode on the other main surface of the electrolyte membrane, an anode separator on the anode, and a cathode separator on the cathode, the at least one hydrogen pump unit transferring, to the cathode, hydrogen supplied to the anode and pressurizing the hydrogen, a first fixing member for preventing movement of the cathode separator in a direction in which the cathode separator is stacked, a first end plate on the anode separator at one end in the stacking direction, a second end plate on the cathode separator at the other end in the stacking direction, and a first gas flow channel through which hydrogen in the cathode is supplied to a first space between the second end plate and the cathode separator.

Abstract: A compression apparatus includes an electrolyte membrane, an anode on a principal surface of the electrolyte membrane, a cathode on another principal surface of the electrolyte membrane, an anode separator on the anode, a cathode separator on the cathode, and a voltage applicator. Upon the voltage applicator applying a voltage between the anode and the cathode, protons are extracted from an anode fluid fed to the anode to migrate to the cathode through the electrolyte membrane and compressed hydrogen is produced. The cathode separator has a first O-ring groove formed in a cathode-side principal surface of the cathode separator to surround a region of the cathode-side principal surface which faces the cathode. The compression apparatus includes a first O-ring held by the first O-ring groove and a face seal disposed on an outer periphery of a region of an anode-side principal surface of the anode separator which faces the anode.

Abstract: An electrochemical cell for a hydrogen pump includes an electrolyte membrane, an anode catalyst layer disposed on a first main surface of the electrolyte membrane, a cathode catalyst layer disposed on a second main surface of the electrolyte membrane, an anode gas diffusion layer disposed on the anode catalyst layer, and a cathode gas diffusion layer disposed on the cathode catalyst layer. When a voltage is applied between the anode catalyst layer and the cathode catalyst layer, the cathode gas diffusion layer is exposed to a hydrogen-containing gas at a pressure higher than that at the anode gas diffusion layer. A thickness of the anode gas diffusion layer is greater than or equal to a thickness of the cathode gas diffusion layer.

Abstract: A compressor device includes: a compressor that causes, by applying a voltage between an anode and a cathode, hydrogen in a hydrogen-containing gas supplied to the anode to move through an electrolyte membrane to the cathode and compresses the hydrogen; a first regulator that regulates the dew point of the hydrogen-containing gas to be supplied to the anode; a second regulator that regulates the temperature of the hydrogen-containing gas to be supplied to the anode; and a controller that controls at least one of the first regulator or the second regulator based on the pressure of the hydrogen-containing gas to be supplied to the anode.

Abstract: A compressor device includes: a compressor that causes, by applying a voltage between an anode and a cathode, hydrogen in an anode gas to move through an electrolyte membrane to the cathode and compresses the hydrogen; a regulator that regulates the temperature of the anode gas in the compressor; and a controller that controls the regulator to regulate the temperature of the anode gas at an outlet of the anode based on at least one of the pressure of a cathode gas or a current flowing between the anode and the cathode under the application of the voltage.