Patents by Inventor Osanobu FUKUO

Osanobu FUKUO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Alumina sintered body, method for manufacturing the same, and part for semiconductor manufacturing apparatus
    Patent number: 11306029
    Abstract: An alumina sintered body comprising 0.01 to 1.0 mass % of one or more types selected from Ta, Nb, and V in terms of oxide thereof. The alumina sintered body may further comprise 0.01 to 1.0 mass % of Mg in terms of Mg oxide. It is particularly preferable that the alumina sintered body has an alumina purity of 99% or more. An alumina sintered body having low dielectric loss as compared with that in related art can therefore be produced at low cost.
    Type: Grant
    Filed: July 31, 2018
    Date of Patent: April 19, 2022
    Assignee: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Shunichi Eto, Osanobu Fukuo, Kiyotaka Saitou
  • ALUMINA SINTERED BODY, METHOD FOR MANUFACTURING THE SAME, AND PART FOR SEMICONDUCTOR MANUFACTURING APPARATUS
    Publication number: 20200239368
    Abstract: An alumina sintered body comprising 0.01 to 1.0 mass % of one or more types selected from Ta, Nb, and V in terms of oxide thereof. The alumina sintered body may further comprise 0.01 to 1.0 mass % of Mg in terms of Mg oxide. It is particularly preferable that the alumina sintered body has an alumina purity of 99% or more. An alumina sintered body having low dielectric loss as compared with that in related art can therefore be produced at low cost.
    Type: Application
    Filed: July 31, 2018
    Publication date: July 30, 2020
    Applicant: FERROTEC MATERIAL TECHNOLOGIES CORPORATION
    Inventors: Shunichi ETO, Osanobu FUKUO, Kiyotaka SAITOU