Patents by Inventor Oscar Florendo

Oscar Florendo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SYSTEMS AND METHODS FOR UNIFORM COOLING OF ELECTROMAGNETIC COIL
    Publication number: 20230133576
    Abstract: A system and method for uniform cooling of an electromagnetic coil are provided. The system includes an electromagnetic coil, a cooling structure, and a cooling fluid source. The cooling structure surrounds the entirety of the perimeter of the electromagnetic coil, and includes a first cooling channel and a second cooling channel arranged alternately about the electromagnetic coil. The cooling fluid source is configured to deliver a first cooling fluid to the first cooling channel and a second cooling fluid to the second cooling channel, such that the first cooling fluid and the second cooling fluid cool the electromagnetic coil.
    Type: Application
    Filed: January 4, 2022
    Publication date: May 4, 2023
    Inventors: Oscar Florendo, Vincent Nguyen
  • Delivery of light into a vacuum chamber using an optical fiber
    Patent number: 11302590
    Abstract: A system for laser enhanced voltage contrast using an optical fiber is provided. The system includes a vacuum chamber with a stage that secures a wafer. A laser light source outside the vacuum chamber directs light to an optical fiber. The optical fiber transmits all wavelengths of light from the laser light source into the vacuum chamber through a wall of the vacuum chamber.
    Type: Grant
    Filed: November 22, 2019
    Date of Patent: April 12, 2022
    Assignee: KLA CORPORATION
    Inventors: Emanuel Saerchen, Donald W. Pettibone, Oscar Florendo, Li-Min Chen, Martin Brutsch
  • DELIVERY OF LIGHT INTO A VACUUM CHAMBER USING AN OPTICAL FIBER
    Publication number: 20200266116
    Abstract: A system for laser enhanced voltage contrast using an optical fiber is provided. The system includes a vacuum chamber with a stage that secures a wafer. A laser light source outside the vacuum chamber directs light to an optical fiber. The optical fiber transmits all wavelengths of light from the laser light source into the vacuum chamber through a wall of the vacuum chamber.
    Type: Application
    Filed: November 22, 2019
    Publication date: August 20, 2020
    Inventors: Emanuel Saerchen, Donald W. Pettibone, Oscar Florendo, Li-Min Chen, Martin Brutsch
  • METHOD OF ELIMINATING THERMALLY INDUCED BEAM DRIFT IN AN ELECTRON BEAM SEPARATOR
    Publication number: 20190228944
    Abstract: These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant power in the beam separator coils. Wien power can be determined, and then heater coil current can be determined.
    Type: Application
    Filed: May 15, 2018
    Publication date: July 25, 2019
    Inventors: Sameet K. Shriyan, Oscar Florendo, Joseph Maurino, Daniel Bui
  • Method of eliminating thermally induced beam drift in an electron beam separator
    Patent number: 10340114
    Abstract: These electron beam separator designs address thermally-induced beam drift in an electron-optical system. A heater coil wrapped around the beam separator unit can maintain constant power. Additional coils also can be wrapped around the beam separator in a bifilar manner, which can maintain constant power in the beam separator coils. Wien power can be determined, and then heater coil current can be determined.
    Type: Grant
    Filed: May 15, 2018
    Date of Patent: July 2, 2019
    Assignee: KLA-Tencor Corporation
    Inventors: Sameet K Shriyan, Oscar Florendo, Joseph Maurino, Daniel Bui