Patents by Inventor Oscar Ĥemberg

Oscar Ĥemberg has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for generating X-ray or EUV radiation
    Patent number: 6760406
    Abstract: In a method of generating X-ray or EUV radiation, a substance is urged through an outlet to generate a jet in a direction from the outlet, at least one energy beam is directed onto the jet, the energy beam interacting with the jet to generate the X-ray or EUV radiation, and the temperature of the outlet is controlled, such that the stability of the jet is improved. An apparatus is also disclosed.
    Type: Grant
    Filed: October 12, 2001
    Date of Patent: July 6, 2004
    Assignee: Jettec AB
    Inventors: Hans Martin Hertz, Oscar Ĥemberg, Lars Rymell, Björn A.M. Hansson, Magnus Berglund