Abstract: The present invention provides an apparatus for producing a Langmuir-Blodgett film including a water bath having a spread region for spreading a material for forming a single molecular film on a liquid surface, a compression region for compressing the material spread by the spread region to form a single molecular film, and a lamination region for laminating the single molecular film formed by the compression region on a substrate.

Abstract: An apparatus and process for producing organic monomolecular or multilayer films continuously comprises a tank having a spreading region (S) for spreading a material to form a monomolecular film, a compression region (C) for compressing the material on the liquid surface to form the monomolecular film and a deposition region (D) where the monomolecular film is deposited on a substrate. Means is provided to cause liquid to flow continuously from the spreading region to the deposition region through the compression region. A first control means is provided to maintain the liquid level in the deposition region D at a predetermined level. A second control means is provided for regulating the surface pressure of the monomolecular film at a predetermined value. Fluid flow through the apparatus is regulated so that the thickness of the liquid flow in the region C is less than thickness of the liquid flow in the regions S and D, and a decoupling region DS is provided between the region S and the region C.

Abstract: A method of forming a monomolecular film capable of independently controlling the process of forming a monomolecular film and the process of removing a part of the monomolecular film which has not been used in monomolecular film formation. The method includes, in addition to spreading a material for forming a monomolecular film onto a water surface, compressing the material on the water surface thereby transforming the material into a monomolecular film, and transferring the monomolecular film on the water surface onto a substrate, storing in a first region a part of the monomolecular film which has not been transferred to the substrate. The first region is located at a distance from a second region for preparing the monomolecular film with respect to a third region for transferring part of the film to the substrate, and has a water level lower than that of the third region.

Abstract: A method for detecting defects in a film structure of a thin film formed on a substrate by projecting a light flux in a direction precisely parallel or nearly parallel to the face of the substrate, separating a reflected light from the thin film and the substrate from a scattered light in a direction precisely perpendicular or nearly perpendicular to the face of the substrate and reading information only of the scattered light.

Abstract: Disclosed is a method and apparatus for continuously forming and depositing a layer of monomolecular amphiphilic molecules on a substrate. The present invention includes an apparatus and method for transferring and compressing an uncompressed molecular layer from one liquid surface region in a tank to another adjacent liquid surface region by using non-moving or static mechanical components which do not come into direct contact with the monomolecular layer. The present invention includes a method and apparatus which permit the continuous and simultaneous draining and replenishing of the liquid in the tank while maintaining the liquid surface level constant. The continuous replacement of the liquid in the tank with clean liquid reduces the level of contamination of the liquid in the tank. In addition, the level, as well as the type of contamination of the liquid, does not vary significantly with time.

Abstract: Disclosed is a method and apparatus for continuously forming and depositing a layer of monomolecular amphiphilic molecules on a substrate. The present invention includes an apparatus and method for transferring and compressing an uncompressed molecular layer from one liquid surface region to another adjacent liquid surface region by using non-moving or static mechanical components which do not come into direct contact with the monomolecular layer. The present invention is based on the fact that by continuously flowing liquid from one region to an adjacent region by using non-moving or static mechanical components that do not touch the monomolecular layer, a monomolecular layer having surprisingly little damage can be transported to the adjacent region and simultaneouly compressed by the flowing liquid surface. The monomolecular layer can then be coated onto a substrate.