Abstract: An optical test device for testing flat test objects comprises a holder for the test object and two optical sensors for detecting the three-dimensional surface topography of the test object. According to the invention, the holder is formed at least in sections as a test standard and is disposed with respect to the sensors in such a way that the sensors scan the test object from opposite sides and also detect the holder as a test standard at least in sections during the detecting of the test object.

Abstract: A machine part (12) is guided along a defined movement path (28) over a workpiece surface (23). The machine part (12) is held at a defined distance (50) from the workpiece surface (23) during this movement. For that purpose, a distance sensor (14) is provided that runs ahead of the machine part (12) with a defined lead (18). A plurality of distance values between the distance sensor (14) and the workpiece surface (23) are determined. A plurality of control values for adjusting the defined distance (50) are determined as a function of the distance values. The defined distance (50) is repeatedly adjusted by means of the control values. In accordance with one aspect of the invention, the distance values along the movement path (28) are determined by means of a first grid spacing (46). The control values are determined along the movement path (28) with a second grid spacing (44). The first and the second grid spacings (46, 44) are different.

Abstract: A machine part is guided along a defined movement path over a workpiece surface. The machine part is held at a defined distance from the workpiece surface during this movement. For that purpose, at least one distance sensor is provided that runs ahead of the machine part with a defined lead. A plurality of distance values indicative of a distance between the distance sensor and the workpiece surface are determined along the movement path. A plurality of control values are determined as a function of the distance values. The defined distance is repeatedly adjusted by means of the control values. In accordance with a first aspect, the distance values are determined at measurement points distributed with a first grid spacing along the movement path, while the control values are determined for actuating points distributed with a second grid spacing along the movement path, the first and the second grid spacings being different.

Abstract: Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.

Abstract: Systems and methods are disclosed for focusing a beam for an interaction with a film deposited on a substrate wherein the focused beam defines a short axis and a long axis. In one aspect, the system may include a detecting system to analyze light reflected from the film on an image plane to determine whether the beam is focused in the short axis at the film. In still another aspect, a system may be provided for positioning a film (having an imperfect, non-planar surface) for interaction with a shaped line beam.